US3589336A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Horizontal liquid phase epitaxy apparatus
Assignee: AT&T Inc
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Filing: 1969-12-29
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Granted: 1971-06-29
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Expires: 1989-12-29
Abstract
Abstract A liquid phase crystal growth apparatus designed to permit simultaneous growth upon a plurality of substrates is described. The apparatus includes a container having a pair of compartments for containing a melt during various stages in the operation of the process, one of said compartments including means for holding the substrates. In the growth process, the container is rotated, thereby effectuating flow of the melt from one compartment to the other with the concurrent dropping of substrates upon the melt surface. Growth is then initiated by cooling a saturated melt.
Inventors
- 👤 Arpad A Bergh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:03
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/061; Y; Y10; Y10S; Y10S148/00; Y10S148/056
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
181 words
A liquid phase crystal growth apparatus which comprises: a. a container; b. a first compartment within said container for holding a melt when the base of said container lies in a first direction; c. a second compartment within said container for holding said melt when the base lies in a second direction; d. an open-top, slot-type, substrate holding means disposed within an upper portion of said second compartment for loosely holding at least one substrate when the base lies in said first direction; e. rotating means attached to said container for rotating the base from said first direction into said second direction and back into said first direction; f. a conduit means for channeling said melt from said first compartment to said second compartment when said base rotates from said first direction to said second direction; and g. said substrate holding means, compartments and conduit means being structurally so related whereby, upon rotation of the containers from the first direction to the second direction, said substrate is released from the holding means and deposited upon said melt in the second compartment.
Claim 2
Dependent Claim
181 words
A liquid phase crystal growth apparatus which comprises: a. a container; b. a first compartment within said container for holding a melt when the base of said container lies in a first direction; c. a second compartment within said container for holding said melt when the base lies in a second direction; d. an open-top, slot-type, substrate holding means disposed within an upper portion of said second compartment for loosely holding at least one substrate when the base lies in said first direction; e. rotating means attached to said container for rotating the base from said first direction into said second direction and back into said first direction; f. a conduit means for channeling said melt from said first compartment to said second compartment when said base rotates from said first direction to said second direction; and g. said substrate holding means, compartments and conduit means being structurally so related whereby, upon rotation of the containers from the first direction to the second direction, said substrate is released from the holding means and deposited upon said melt in the second compartment.
Claim 3
Dependent Claim
26 words
The apparatus as defined in claim 1 which further comprises a heat dissipation means covering said second compartment for uniformly dissipating heat from said second compartment.
Claim 4
Dependent Claim
15 words
The apparatus as defined in claim 2 wherein said heat-dissipating means is a heat shield.
Claim 5
Dependent Claim
42 words
The apparatus as defined in claim 1 wherein a plurality of said substrate-holding means are disposed within said second compartment and said second compartment comprises a separate melt holding portion associated with the separate ones oF said plurality of substrate holding means.
Claim 6
Dependent Claim
45 words
The apparatus as defined in claim 4 wherein means are disposed to retain said substrates within the second compartment when the container is rotated back from said second direction to the first direction while permitting the nonconsumed melt to be returned to said first compartment.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-28 | 1974-12-28 | 1975-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-28 | 1978-12-28 | 1979-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-28 | 1982-12-28 | 1983-06-29 | $7700.00 | Window Closed / Lapsed |