US3585480A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Control system for wafer test apparatus
Assignee: Transistor Automation Corp
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Filing: 1968-11-19
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Granted: 1971-06-15
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Expires: 1988-11-19
Abstract
Abstract A control system is provided for use in the operation of an XYZ table supporting an integrated circuit wafer for test purposes. The system is adapted to receive inputs from a computer or tape reader to provide automatic point-to-point probing of the wafer. The system may be converted from one form of input to another by substituting interface and diode matrix decoding circuit boards. The system employs a down counter in place of a register as a memory unit and functions by setting into the counter a particular number representing an instruction to index the table a certain distance along an axis. When the counter counts down to zero the system stops.
Inventors
- 👤 Johnny T Kirkpatrick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 14:38
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/19; G05B19/40; G05B19/21; G05B19/23
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
203 words
A system for moving a member selectively along at least three different paths in response to coded instructions, said system comprising: a. a first motor adapted to move said member along a first path; b. a second motor adapted to move said member along a second path; c. reversible counter means operatively connected to said system; d. first circuit means for delivering said coded instructions in pulse form to said counter means, said counter means being adapted to accumulate a count of said pulse; e. oscillator means electrically communicating with said first and second motor and counter means for generating a sequence of pulses, said first and second motor means moving said member in response to said oscillator means pulses, said counter means counting to zero in response to said oscillator means pulses, each one of said oscillator means pulses decreasing said accumulated count by one, said first and second motors stopping when said counter means is at zero count; f. reciprocating means for moving said member along a third path mutually perpendicular to said first and second paths; and g. second circuit means operable upon termination of movement of said member along said first and second paths for actuating said reciprocating means.
Claim 2
Independent Claim
203 words
A system for moving a member selectively along at least three different paths in response to coded instructions, said system comprising: a. a first motor adapted to move said member along a first path; b. a second motor adapted to move said member along a second path; c. reversible counter means operatively connected to said system; d. first circuit means for delivering said coded instructions in pulse form to said counter means, said counter means being adapted to accumulate a count of said pulse; e. oscillator means electrically communicating with said first and second motor and counter means for generating a sequence of pulses, said first and second motor means moving said member in response to said oscillator means pulses, said counter means counting to zero in response to said oscillator means pulses, each one of said oscillator means pulses decreasing said accumulated count by one, said first and second motors stopping when said counter means is at zero count; f. reciprocating means for moving said member along a third path mutually perpendicular to said first and second paths; and g. second circuit means operable upon termination of movement of said member along said first and second paths for actuating said reciprocating means.
Claim 3
Dependent Claim
19 words
A system according to claim 1 including interchangeable decode circuit means for accommodating said system to different coded instructions.
Claim 4
Dependent Claim
20 words
A system according to claim 1 in combination with testing means for testing said member upon termination of movement thereof.
Claim 5
Independent Claim
265 words
A system for testing integrated circuit wafers and the like, comprising: a. a support for said wafer, b. a probe tip disposed in spaced relation to said wafer, c. means for causing relative movement in a given direction between said tip and support for making contact bEtween said tip and said wafer, d. a table carrying said support, e. said table being movable along two mutually perpendicular paths said paths being perpendicular to said direction, f. a pair of pulse responsive motors drivingly connected to said table for indexing said table, said support and said wafer selectively along said paths, g. a source of coded instructions for said system, h. reversible counter means operatively connected to said source and to both of said motors, i. first circuit means for delivering instructions from said source in pulse form to said counter, j. said counter being adapted to accumulate a count of said pulses, upon reversal to deliver pulses corresponding to said count to said motors to index both of said motors according to said instructions, and, k. oscillator means electrically communicating with said motors and counter means for generating a sequence of pulses, said motor means indexing said table in response to said oscillator means pulses, said counter means counting to zero in response to said oscillator means pulses, each one of said oscillator means pulses decreasing said accumulated count by one, said motor means stopping when said counter means is at zero, and l. Actuating means responsive to termination of movement of said table for causing said relative movement between said tip and said support.
Claim 6
Independent Claim
265 words
A system for testing integrated circuit wafers and the like, comprising: a. a support for said wafer, b. a probe tip disposed in spaced relation to said wafer, c. means for causing relative movement in a given direction between said tip and support for making contact bEtween said tip and said wafer, d. a table carrying said support, e. said table being movable along two mutually perpendicular paths said paths being perpendicular to said direction, f. a pair of pulse responsive motors drivingly connected to said table for indexing said table, said support and said wafer selectively along said paths, g. a source of coded instructions for said system, h. reversible counter means operatively connected to said source and to both of said motors, i. first circuit means for delivering instructions from said source in pulse form to said counter, j. said counter being adapted to accumulate a count of said pulses, upon reversal to deliver pulses corresponding to said count to said motors to index both of said motors according to said instructions, and, k. oscillator means electrically communicating with said motors and counter means for generating a sequence of pulses, said motor means indexing said table in response to said oscillator means pulses, said counter means counting to zero in response to said oscillator means pulses, each one of said oscillator means pulses decreasing said accumulated count by one, said motor means stopping when said counter means is at zero, and l. Actuating means responsive to termination of movement of said table for causing said relative movement between said tip and said support.
Claim 7
Dependent Claim
25 words
A system according to claim 4 including interchangeable decode circuit means between said source and said counter for accommodating said system to different coded instructions.
Claim 8
Dependent Claim
12 words
A system according to claim 4 wherein said source is a computer.
Claim 9
Dependent Claim
17 words
A system according to claim 4 wherein said source is a combination coded tape and tape reader.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-14 | 1974-12-14 | 1975-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-14 | 1978-12-14 | 1979-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-14 | 1982-12-14 | 1983-06-15 | $7700.00 | Window Closed / Lapsed |