US3583899A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering apparatus
Assignee: Saint Gobain Abrasives Inc
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Filing: 1968-12-18
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Granted: 1971-06-08
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Expires: 1988-12-18
Abstract
Abstract SPUTTER APPARATUS OF THE ELECTRON ASSISTED TYPE WITH A "FOUR-ELECTRODE" SPUTTER STRUCTURE AND SUBSTRATE ENCLOSING AN ELONGATED SPACE. AN ELONGATED ELECTRON SOURCE EXTENDS ALONG THE FULL LENGTH OF AN EDGE OF THE SPACE AND AN ELONGATED ANODE EXTENDS ALONG AN OPPOSITE EDGE. AN ELONGATED GRID ADJACENT THE ELECTRON EMITTER MAINTAINS THE DISCHARGE AND MASKS THE EMITTER. THE ARRANGEMENT ALLOWS STABLE LOW PRESSURE SPUTTERING AT HIGH RATES AND WITH HIGH UNIFORMITY WITHOUT USE OF AN ASSISTING MAGNETIC FIELD AND AFFORDS GREATER FREEDOM FOR EFFECTIVE DESIGN OF THE ENCLOSING VACUUM SYSTEM.
Inventors
- 👤 Arnold J Aronson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 10:48
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3471; C23C14/3478
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-07 | 1974-12-07 | 1975-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-07 | 1978-12-07 | 1979-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-07 | 1982-12-07 | 1983-06-08 | $7700.00 | Window Closed / Lapsed |