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US3579916A Expired / Lapsed US ⏱️ 0.0 years remaining

Polishing machine

Assignee: Speedfam Corp
•
Filing: 1968-11-15
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Granted: 1971-05-25
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Expires: 1988-11-15
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Abstract

Abstract A polishing machine spindle assembly and associated load plate unit having passageway means opening at the lower surface of the unit and adapted to be placed under vacuum for maintaining a workpiece in engagement with the lower surface of the unit.

Inventors

  • 👤 Stephen A Boettcher
  • 👤 Louis F Simonetti

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 22:18
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/07; B24B37/10; B24B37/102

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 193 words
In a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit adapted to receive at least one workpiece at the lower surface thereof for engagement with the polishing wheel assembly, and means mounting the load plate unit on the spindle assembly, the improvement which comprises said load plate unit having a central upwardly directed Aperture, said load plate unit having passageway means communicating with said aperture and opening at said lower surface of said unit, said spindle assembly having a lower section that projects into said aperture and including passageway means communicating with said aperture and adapted to be placed under vacuum for creating a vacuum in said passageway means of said load plate unit whereby to maintain a workpiece in engagement with the lower surface of said unit, said mounting means comprising swivel connection means, and rotary vacuum seal means between said lower section of said spindle assembly and said load plate unit adjacent said aperture.
Claim 2
Dependent Claim 193 words
In a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit adapted to receive at least one workpiece at the lower surface thereof for engagement with the polishing wheel assembly, and means mounting the load plate unit on the spindle assembly, the improvement which comprises said load plate unit having a central upwardly directed Aperture, said load plate unit having passageway means communicating with said aperture and opening at said lower surface of said unit, said spindle assembly having a lower section that projects into said aperture and including passageway means communicating with said aperture and adapted to be placed under vacuum for creating a vacuum in said passageway means of said load plate unit whereby to maintain a workpiece in engagement with the lower surface of said unit, said mounting means comprising swivel connection means, and rotary vacuum seal means between said lower section of said spindle assembly and said load plate unit adjacent said aperture.
Claim 3
Dependent Claim 46 words
The improvement of claim 1 wherein said passageway means of said load plate unit includes radially extending passageway means communicating with said aperture, and axially extending passageway means communicating with said radially extending passageway means and opening at said lower surface of said load plate unit.
Claim 4
Dependent Claim 39 words
The improvement of claim 2 wherein said radially extending passageway means is comprised of a plurality of radial passageways, and said axially extending passageway means is comprised of a plurality of axial ports radially spaced along said radial passageways.
Claim 5
Dependent Claim 184 words
In a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit adapted to receive at least one workpiece at the lower surface thereof for engagement with the polishing wheel assembly, and means mounting the load plate unit on the spindle assembly, the improvement which comprises said load plate unit having a central upwardly directed aperture, said load plate unit having passageway means communicating with said aperture and opening at said lower surface of said unit, said spindle assembly having passageway means communicating with said aperture and adapted to be placed under vacuum for creating a vacuum in said passageway means of said load plate unit whereby to maintain a workpiece in engagement with the lower surface of said unit, and said load plate unit including a central disc at said lower surface of said unit for locating an annular workpiece engaged with said lower surface of said unit.
Claim 6
Dependent Claim 184 words
In a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit adapted to receive at least one workpiece at the lower surface thereof for engagement with the polishing wheel assembly, and means mounting the load plate unit on the spindle assembly, the improvement which comprises said load plate unit having a central upwardly directed aperture, said load plate unit having passageway means communicating with said aperture and opening at said lower surface of said unit, said spindle assembly having passageway means communicating with said aperture and adapted to be placed under vacuum for creating a vacuum in said passageway means of said load plate unit whereby to maintain a workpiece in engagement with the lower surface of said unit, and said load plate unit including a central disc at said lower surface of said unit for locating an annular workpiece engaged with said lower surface of said unit.
Claim 7
Dependent Claim 46 words
The improvement of claim 1 wherein said passageway means of said spindle assembly is defined by a central axial opening which communicates with said aperture and a radial opening which communicates with said axial opening and is adapted to be connected to a vacuum producing source.
Claim 8
Dependent Claim 121 words
For use in a polishing machine, a circular load plate unit having an aperture which opens axially at one side of said unit, and having passageway means including a plurality of radially extending passageways communicating with said aperture and a plurality of axial ports radially spaced along said radially extending passageways in communicating relation therewith and opening at the other side of said load plate unit, said passageway means being adapted to maintain a workpiece in engagement with said other side of said unit when a vacuum is created in said passageway means, said load plate including an adjustable central disc at said other side of said unit for locating an annular workpiece engaged with said other side of said unit.
Claim 9
Dependent Claim 121 words
For use in a polishing machine, a circular load plate unit having an aperture which opens axially at one side of said unit, and having passageway means including a plurality of radially extending passageways communicating with said aperture and a plurality of axial ports radially spaced along said radially extending passageways in communicating relation therewith and opening at the other side of said load plate unit, said passageway means being adapted to maintain a workpiece in engagement with said other side of said unit when a vacuum is created in said passageway means, said load plate including an adjustable central disc at said other side of said unit for locating an annular workpiece engaged with said other side of said unit.

References Cited (Backward Citations)

US1198402A Cited
US2184955A Cited
US2405417A Cited
US2687603A Cited
US2998680A Cited
US3110988A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-05-24 1974-11-23 1975-05-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-05-24 1978-11-23 1979-05-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-05-24 1982-11-23 1983-05-25 $7700.00 Window Closed / Lapsed

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