US3576729A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering methods and apparatus
Assignee: Smiths Group PLC
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Filing: 1968-05-31
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Granted: 1971-04-27
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Expires: 1988-05-31
Abstract
Abstract SPUTTER-DEPOSITION OF SUPERIMPOSED METAL FILMS ON CERAMIC SUBSTRATES IN BATCH-PRODUCTION OF MICROCIRCUIT DEVICES IS MADE BY IONIC BOMBARDMENT OF SUCCESSIVE TARGETS FROM A PLASMA CREATED USING AN ELECTRON BEAM, THE BOMBARDMENT BEING ACCOMPANIED BY APPLICATION OF A TRANSVERSE MAGNETIC FIELD ROTATING ABOUT THE PATH OF THE BEAM. THE SUBSTRATES ARE CARRIED BETWEEN TARGET-ASSEMBLIES THAT ARE ROTATABLE TO EFFECT DEPOSITION FROM DIFFERENT TARGETS SUCCESSIVELY, AND THE TOP AND BOTTOM FILMS DEPOSITED ARE ETECHED AWAY TO FORM RESPECTIVELY THE CIRCUIT INTERCONNECTIONS AND RESISTIVE ELEMENTS OF THE DEVICES.
Inventors
- 👤 Norman Lomas Sigournay
- 👤 Hugh Norman Evans
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 00:58
CPC Classifications
F; F16; F16C; F16C33/00; F16C33/02; F16C33/04; F16C33/06; F16C33/10; F16C33/1025; F16C33/106; F16C33/1065; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; F16C17/00; F16C17/10; F16C17/102; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-04-26 | 1974-10-26 | 1975-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-04-26 | 1978-10-26 | 1979-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-04-26 | 1982-10-26 | 1983-04-27 | $7700.00 | Window Closed / Lapsed |