US3575745A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated circuit fabrication
Assignee: Individual
•
Filing: 1969-04-02
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Granted: 1971-04-20
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Expires: 1989-04-02
Abstract
Abstract A TECHNIQUE FOR FABRICATING INTEGRATED CIRCUITS. THE TECHNIQUE TAKES ADVANTAGE OF THE FACT THAT CERTAIN OXIDES SUCH AS A12O3 AND TA2O5 HAVE THEIR SUSCEPTIBILITY TO ETCHING MATERIALS RETARDED BY IRRADIATION WITH AN ELECTRON BEAM WHILE OTHER OXIDES SUCH AS SIO2 HAVE THEIR SUSCEPTIBILITY TO ETCHING MATERIALS ENHANCED BY IRRADIATION WITH AND ELECTRON BEAM. BY TAKING ADVANTAGE OF THE ABOVE FACTS ONE CAN ETCH OPENINGS IN SELECTED AREAS OF OXIDE LAYERS WITHOUT RESORTING TO COMPLICATED MASKING TECHNIQUES PREVIOUSLY REQUIRED.
Inventors
- 👤 Bryan H Hill
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 23:43
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10W; H10W74/00; H10W74/01; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/051; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-04-19 | 1974-10-19 | 1975-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-04-19 | 1978-10-19 | 1979-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-04-19 | 1982-10-19 | 1983-04-20 | $7700.00 | Window Closed / Lapsed |