Patent US6648800B2 successfully refreshed from Google Patents.
US3568014A
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Graded insulator thin film capacitor and method of making
Assignee: FRITZ L SCHUERMEYER
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Filing: 1969-06-09
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Granted: 1971-03-02
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Expires: 1989-06-09
Abstract
Abstract A thin film capacitor suitable for microelectronic circuit applications using aluminum as one electrode and any suitable metal, such as gold, as the other electrode. The dielectric is a metallic oxide of high dielectric constant, such as Ta205, contacted directly by the gold electrode but having a thin film of A1203 interposed between it and the aluminum electrode. The relatively high barrier of the A1-A1203 interface prevents the injection of electrons from the metal into the dielectric and greatly reduces the dissipation and rectifying tendency of the capacitor.
Inventors
- 👤 Fritz L Schuermeyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:06
CPC Classifications
H; H01; H01B; H01B3/00; H01B3/02; H01B3/10; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
107 words
A thin film capacitor comprising, on an insulating substrate, a first electrode consisting of a thin layer of aluminum having a portion of its surface oxidized to A1203 to a small depth, a layer of Ta205 on said oxidized surface constituting the principal dielectric of the capacitor, and a second electrode on said Ta205 layer, said second electrode being a thin layer of a metal having at its interface with the Ta205 dielectric a much higher energy barrier against the injection of electrons from the metal into the conduction band of the Ta205 than the relatively low barrier that exists at an interface between Ta and Ta205.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-01 | 1974-08-31 | 1975-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-01 | 1978-08-31 | 1979-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-01 | 1982-08-31 | 1983-03-02 | $7700.00 | Window Closed / Lapsed |