US3565674A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition of silicon nitride
Assignee: Motorola Solutions Inc
•
Filing: 1970-03-10
•
Granted: 1971-02-23
•
Expires: 1990-03-10
Abstract
Abstract SILICON NITRIDE IS DEPOSITED BY THE REACTION OF SILANE WITH AMMONIA, IN A HYDROGEN AMBIENT, UPON CONTACT WITH A HEATED SUBSTRATE. THE RATIO OF AMMONIA TO SILANE IS PARTICULARLY CRITICAL IN DETERMINING THE NATURE OF THE NITRIDE DEPOSIT.
Inventors
- 👤 Bernard W Boland
- 👤 Don M Jackson Jr
- 👤 James H Williams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 15:57
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/345; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/65; H10P14/6502; H10P14/6512; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-22 | 1974-08-24 | 1975-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-22 | 1978-08-24 | 1979-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-22 | 1982-08-24 | 1983-02-23 | $7700.00 | Window Closed / Lapsed |