US3563873A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing thin tungsten-silicon resistor films
Assignee: Dickson Electronics Corp
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Filing: 1968-06-28
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Granted: 1971-02-16
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Expires: 1988-06-28
Abstract
Abstract THE PRODUCTION OF THIN FILMS ON A SUBSTRATE IS EFFECTED BY SPUTTERING THE FILM ON THE SUBSTRATE; SPUTTERING IS ACHIEVED BY SUBJECTING A TUNGSTEN-SILICON TARGET TO IONIC BOMBARDMENT. THE IONIZING BOMBARDMENT IS ACHIEVED IN AN ARGON ATMOSPHERE BY IMPRESSING A RF POTENTIAL BETWEEN THE TARGET AND AN ALUMINUM ELECTRODE; A GROUNDED ALUMINUM SHIELD SHROUDS THE ALUMINUM ELECTRODE.
Inventors
- 👤 Donald S Beyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 02:33
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47; H10D1/474; C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/22; C23C14/56; C23C14/564; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-15 | 1974-08-17 | 1975-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-15 | 1978-08-17 | 1979-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-15 | 1982-08-17 | 1983-02-16 | $7700.00 | Window Closed / Lapsed |