US3563443A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pneumatic force-exerting system
Assignee: Hugle Ind Inc
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Filing: 1969-03-19
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Granted: 1971-02-16
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Expires: 1989-03-19
Abstract
Abstract A system for exerting force in ultrasonic or thermocompression bonding of semiconductor structures. Clamping and leveling pneumatic pistons both supply a combined force initially to level deformable contacts upon a semiconductor chip to the plane occupied by connections upon a substrate by pressing the chip and substrate together. The leveling piston is then disengaged. Bonding is subsequently safely accomplished under a force exerted by only the clamping piston. A balance piston free-floats the chip bonding elements.
Inventors
- 👤 Donald G Pedrotti
- 👤 Rainer Reimann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:33
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0446; B; B23; B23K; B23K20/00; B23K20/10; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49826; Y10T29/49895; Y10T29/49899
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
157 words
Mechanical means for exerting a force having plural successive amplitudes for bonding workpiece (22,38) comprising: a. support means (1,13) for said mechanical means and said workpiece; b. a moveable member (7), having a connection (6,5,11) to said support (13) for exerting said force; c. first pneumatic means (24,25,26) to bear upon said moveable member (7) for exerting a first magnitude of force upon said workpiece; d. second pneumatic means (28,29,30) to bear upon said moveable member (7) for exerting a second magnitude of force upon said workpiece in addition to said first magnitude of force, to increase the total magnitude of force upon said movable member; e. controllable power means (14) to retract said connection (6,5,11) subsequent to the exertion of said second magnitude of force, whereby said second magnitude of force is no longer exerted upon said moveable member and therethrough no longer exerted upon said workpiece; and means operable under said first magnitude of force.
Claim 2
Dependent Claim
157 words
Mechanical means for exerting a force having plural successive amplitudes for bonding workpiece (22,38) comprising: a. support means (1,13) for said mechanical means and said workpiece; b. a moveable member (7), having a connection (6,5,11) to said support (13) for exerting said force; c. first pneumatic means (24,25,26) to bear upon said moveable member (7) for exerting a first magnitude of force upon said workpiece; d. second pneumatic means (28,29,30) to bear upon said moveable member (7) for exerting a second magnitude of force upon said workpiece in addition to said first magnitude of force, to increase the total magnitude of force upon said movable member; e. controllable power means (14) to retract said connection (6,5,11) subsequent to the exertion of said second magnitude of force, whereby said second magnitude of force is no longer exerted upon said moveable member and therethrough no longer exerted upon said workpiece; and means operable under said first magnitude of force.
Claim 3
Dependent Claim
66 words
The mechanical means of claim 1 in which said connection comprises; an axially translatable column (5), a driven member (6) attached to said column (5) and bearing upon said moveable member (7) through said first and second pneumatic means; and axial translating means (11) connected to said column (5) and to said support means (13) to translate said column with respect to said support means (13).
Claim 4
Dependent Claim
37 words
The mechanical means of claim 2, which additionally includes; low friction means (8) connecting said moveable member (7) to said column (5), and further low friction means (9,10) connecting said column (5) to said support means (13).
Claim 5
Dependent Claim
67 words
The mechanical means of claim 2, in which said first pneumatic means comprises; a first cylinder (24) within said driven member (6), and a first piston (25) having a piston rod (26), said first piston being within said first cylinder and said piston rod being sufficiently long to contact said moveable member (7) when the combination of said first cylinder and said first piston is pneumatically energized.
Claim 6
Dependent Claim
84 words
The mechanical means of claim 2, in which said second pneumatic means comprises; a second cylinder (28) within said driven member (6), and a second piston (29) having a piston rod (30), said second piston being within said second cylinder and the piston rod (30) of said second piston (29) being shorter than the piston rod (26) of said first piston, and sufficiently long to also contact said moveable member when the combination of said second cylinder and said second piston is pneumatically energized.
Claim 7
Dependent Claim
25 words
The mechanical means of claim 5, in which the diameter of said second cylinder (28) is larger than the diameter of said first cylinder (24).
Claim 8
Dependent Claim
41 words
The mechanical means of claim 2, which additionally includes; third pneumatic means (18,19) disposed oppositely with respect to said first and second pneumatic means within said driven member, to oppositely bear upon said moveable member (7) for counterbalancing the weight thereof.
Claim 9
Dependent Claim
25 words
The mechanical means of claim 5, in which said controllable means comprises a pneumatic device (53) for removing pneumatic pressure from said second cylinder (28).
Claim 10
Dependent Claim
34 words
The mechanical means of claim 1, which includes ultrasonic bonding means (20,21) attached to said moveable member (7), operable to bond said workpiece (22,38) when said second magnitude of force is no longer exerted.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-15 | 1974-08-17 | 1975-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-15 | 1978-08-17 | 1979-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-15 | 1982-08-17 | 1983-02-16 | $7700.00 | Window Closed / Lapsed |