US3562536A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation sensitive semiconductor wafer identification system
Assignee: International Business Machines Corp
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Filing: 1968-08-30
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Granted: 1971-02-09
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Expires: 1988-08-30
Abstract
Abstract Placement of coded indicia as etched lines in the kerf area of a semiconductor wafer. Scanning and image rotation are used to read out the indicia, which may be binary or frequency coded. Placement of the etched lines at a different angle from the circuit lines allows illumination of the etched lines with minimum interference from the circuit lines.
Inventors
- 👤 Rolf H Brunner
- 👤 Ollie C Woodard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:35
CPC Classifications
G; G06; G06K; G06K7/00; G06K7/10; G06K7/10544; G06K7/10821; G06K7/10861; G06K7/10871; G06V; G06V30/00; G06V30/10; G06V30/22; G06V30/224; G06V30/2247; H; H10; H10W; H10W46/00; H10W46/101; H10W46/106; H10W46/501; H10W46/503
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
70 words
Means for identifying a piece of semiconductor material according to claim 1 wherein said means for detecting comprises: A. lens means for producing an image of at least part of said etched areas; B. means including a slit for passing part of said image; C. photosensitive means for receiving the part of said image passed by said slit; and D. scanning means for moving said image linearly across said slit.
Claim 2
Dependent Claim
26 words
Means for identifying a piece of semiconductor material according to claim 2 further comprising means for causing the image produced by said lens means to rotate.
Claim 3
Dependent Claim
30 words
Means for identifying a piece of semiconductor material according to claim 3 further comprising means for varying the direction of said incident radiation as said image is caused to rotate.
Claim 4
Dependent Claim
92 words
Means for identifying a piece of semiconductor material according to claim 1 wherein said etched areas comprise etched lines, said kerf area including a plurality of kerf area regions, comprising: A. at least one kerf area region of a first type in which said etched lines are spaced a first distance from each other; and B. at least one kerf area region of a second type in which said etched lines are spaced a second distance from each other whereby, the relative placement of regions of different types indicates said numerical code.
Claim 5
Dependent Claim
73 words
Means for identifying a piece of semiconductor material according to claim 1 wherein said kerf area includes a plurality of kerf area regions, comprising: A. at least one kerf area region of a first type including etched areas; and B. at least one kerf area region of a second type not including etched areas, whereby, the relative placements of regions of said first type and of said second type indicate said numerical code.
Claim 6
Dependent Claim
58 words
Means for identifying a piece of semiconductor material according to claim 1 wherein said etched areas comprise etched lines, and wherein said etched lines form an angle other than perpendicular with the edge of said kerf area, and further comprising means for directing said incident radiation at said etched areas in a direction perpendicular to said etched lines.
Claim 7
Dependent Claim
63 words
Means for identifying a piece of semiconductor material according to claim 5, further including at least two kerf area regions of a third type in which said etched lines are spaced a third distance from each other, said third type region being etched on both sides of a group of regions of said first and second type which corresponds to a numerical code.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-08 | 1974-08-10 | 1975-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-08 | 1978-08-10 | 1979-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-08 | 1982-08-10 | 1983-02-09 | $7700.00 | Window Closed / Lapsed |