Method of producing cyclically extending layers

Abstract

Abstract IT IS KNOWN TO DEPOSIT METALLIC OR DIELECTRIC LAYERS BY VAPORIZATION ON A STRAIGHT STRIPE-FORMED SUBSTRATE, WHEREBY THE THICKNESS OF THE LAYERS IS LINEARLY INCREASING ALONG THE STRIPE. INTERFERENCE FILTERS OF SUCH LAYERS SHOW A REGULAR SHIFT OF THE TRANSMISSION CURVE FROM SHORTER TO LONGER WAVELENGHTS. A RECENT DEVELOPMENT SHOWS THAT IT IS POSSIBLE TO DEPOSIT SIMILAR LAYERS IN A CYCLICAL FORM BY DISPOSING BETWEEN THE VAPORIZER AND THE SUBSTRATE TWO DIAPHRAGMS FORMING BETWEENTHEM A RADIAL SLIT, WHEREBY THESE DIAPHRAGMS ARE ROATED WITH DIFFERENT SPEEDS RELATIVELY TO EACH OTHER ABOUT A COMMON AXIS OF ROTATION. FILTERS MADE ACCORDING TO THIS METHOD HAVE THE DISADVANTAGE THAT ALONG ONE PART OF THE CYCLE THE THICKNESS IS STEADILY INCREASING, WHILE ALONG THE FOLLOWING PART IT IS STEADILY DECREASING. THE DISCLSURE SHOW HOW THE RELATIVE MOVEMENT OF THE SUBSTRATE AND THE DIAPHRGAMS MUST BE KEPT FOR OVERCOMING THE SAID DISADVANTGE AND FOR GETTING LAYERS, THE THICKNESS ALONG THE WHOLE CYCLE WITH ONLY ONE INTERRUPTION WHERE THE WAVELENGTH DROPS FROM THE HIGHEST TO THE LOWEST VALUE.

Inventors

• 👤 Walter Geffcken

Bibliographic Details