Apparatus for displaying the image electron signal from a scanning electron microprobe

Claim 1

In a scanning electron microprobe comprising electron-beamgenerating means, specimen-mounting means, means for focusing said electron beam onto a spot on the surface of said specimen, means for scanning said focused electron beam spot over the surface of said specimen to generate an image electron signal therefrom with the image electron signal having low-frequency components representative of gross specimen structure and highfrequency components representative of micron size specimen structure, and means for detecting said image electron signal, the combination with said image-electron-signal-detecting means and electron-beam-scanning means of a cathode-ray tube for forming a picture representative of the structure of the portion of said specimen scanned by said electron beam, means for synchronizing the X and Y axis sweeps of said cathode-ray tube with the scan of said electron beam over the surface of said specimen, filtering means accepting said detected image electron signal to pass only said high-frequency components thereof determinative of said micron-sized specimen structure, and means for modulating the display intensity of said cathode-ray tube responsive to the amplitude of said high-frequency component image electron signal.