US3558878A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of reducing specimen contamination in an electron probe by cooling the objective lens
Assignee: Applied Research Laboratories Inc
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Filing: 1968-07-17
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Granted: 1971-01-26
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Expires: 1988-07-17
Abstract
Abstract An electron microprobe including a magnetic objective lens for focusing an electron beam upon a specimen, and means for cooling the lens to a temperature below about - 20*. It is found that operating results are greatly improved by maintaining the lens cold and the specimen warm. Contamination of the specimen, particularly by carbonaceous materials, can be reduced by more than an order of magnitude without compromise with the operational features of the instrument.
Inventors
- 👤 Hermann Neuhaus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:57
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/252; H01J37/02; H01J37/04; H01J37/10; H01J37/14; H01J37/141
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
41 words
Method according to claim 1 wherein the objective lens structure is electromagnetic and includes means for circulating a fluid in close thermAl contact with it, and the step of cooling is done by passing a cold fluid through the circulating means.
Claim 2
Dependent Claim
24 words
Method according to claim 1 including also the step of simultaneously heating the specimen to avoid excessive cooling of it by the lens structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-25 | 1974-07-27 | 1975-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-25 | 1978-07-27 | 1979-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-25 | 1982-07-27 | 1983-01-26 | $7700.00 | Window Closed / Lapsed |