US3558467A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Relating to radio frequency sputtering
Assignee: Edwards High Vacuum International Ltd
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Filing: 1968-06-21
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Granted: 1971-01-26
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Expires: 1988-06-21
Abstract
Abstract A METHOD AND APPARATUS FOR RADIO FREQUENCY SPUTTERING OF AN INSULATING TARGET BY MAKING THE TARGET PART OF THE WALL OF AN EVACUABLE SPUTTERING DEPOSITION CHAMBER AND ATTACHING A RADIO FREQUENCY ELECTRODE TO THE TARGET OUTSIDE THE DEPOSITION CHAMBER IN A FURTHER EVACUABLE REGION. THE FURTHER REGION IS REDUCED IN PRESSURE WHEN A RADIO FREQUENCY VOLTAGE IS APPLIED TO THE ELECTRODE SO AS TO PROHIBIT EARTHY DISCHARGES.
Inventors
- 👤 Geoffrey Norman Jackson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 06:03
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/34; C23C14/35
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-25 | 1974-07-27 | 1975-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-25 | 1978-07-27 | 1979-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-25 | 1982-07-27 | 1983-01-26 | $7700.00 | Window Closed / Lapsed |