US3558461A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film resistor and preparation thereof
Assignee: AT&T Inc
•
Filing: 1968-10-28
•
Granted: 1971-01-26
•
Expires: 1988-10-28
Abstract
Abstract THIN FILM TANTALUM BASED RESISTORS EVIDENCING A TEMPERATURE COEFFICIENT OF RESISTANCE OF-200 P.P.M./*C. AND THE ATTRIBUTES OF TANTALUM NITRIDE (TA2N) RESISTORS ARE OBTAINED BY REACTIVE SPUTTERING OF TANTALUM IN THE PRESENCE OF OXYGEN AND NITROGEN FOLLOWED BY ANODIZATION AND THERMAL PRE-AGING OF THE RESULTING DEPOSITED FILM. RESISTORS SO FABRICATED MATCH THE POSITIVE TEMPERATURE COEFFICIENT OF CAPACITANCE OF B-TANTALUM CAPACITORS, THEREBY PERMITTING THE PREPARATION OF TANTALUM NITEGRATED CIRCUITS WITH A SMALL AND CONSTANT FREQUENCY RESPONSE OVER A WIDE RANGE OF TEMPERATURE.
Inventors
- 👤 George I Parisi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:00
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/0676; C23C14/0021; C23C14/0036; C23C14/58; C23C14/5806; C23C14/5846; C23C14/5853; H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-25 | 1974-07-27 | 1975-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-25 | 1978-07-27 | 1979-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-25 | 1982-07-27 | 1983-01-26 | $7700.00 | Window Closed / Lapsed |