US3558351A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin semiconductor films
Assignee: AT&T Inc
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Filing: 1968-12-19
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Granted: 1971-01-26
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Expires: 1988-12-19
Abstract
Abstract THE SPECIFICATION DESCRIBES A METHOD FOR DEPOSITING THIN FILMS OF PIEZOELECTRIC MATERIALS IN WHICH THE CRYSTALLOGRAPHIC ORIENTATION IS CONTROLLED BY ADDING A HYDROCARBON TO THE VACUUM CHAMBER WHEN INITIATING DEPOSITION AND BY CONTROLLING THE ANGLE AT WHICH THE DEPOSITING IONS, ATOMS OR MOLECULES MEET THE SUBSTRATE. BY THIS METHOD HIGHLY ORIENTED FILMS OF ZINC OXIDE, ADAPTED FOR PIEZOELECTRIC OPERATION IN THE SHEAR MODE, CAN BE PRODUCED.
Inventors
- 👤 Norman F Foster
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:55
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/225; C23C14/34; C23C14/35; C23C14/354; C23C14/355; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-25 | 1974-07-27 | 1975-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-25 | 1978-07-27 | 1979-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-25 | 1982-07-27 | 1983-01-26 | $7700.00 | Window Closed / Lapsed |