Arrangement for interferometric measurement of a plurality of lengths with monochromatic light beams
Abstract
Abstract AN ARRANGEMENT FOR SIMULTANEOUS INTERFEROMETRIC MEASUREMENT OF A PLURALITY OF LENGTHS UTILIZES A SINGLE MONOCHROMATIC CIRCULAR LIGHT BEAM WHICH IS DIVIDED UP BY INTENSITY IN A FIRST OPTICAL DIVIDER INTO AN OUTGOING REFERENCE BEAM AND AN OUTGOING MEASUREMENT BEAM. THE OUTGOING MEASUREMENT BEAM IS FURTHER DIVIDED BY INTENSITY IN A SECOND OPTICAL DIVIDED AFTER TRAVERSING ONE OF THE LENGTHS TO BE MEASURED INTO OUTGOING TWO PARTIAL MEASUREMENT BEAMS EACH HAVING A SEMICIRCULAR CROSS-SECTION. ONE OF THE PARTIAL MEASUREMENT BEAMS IS REVERSED IN DIRECTION ARE RETURNED TO THE SECOND OPTICAL DIVIDER AFTER TRAVERSING THE SECOND LENGTH TO BE MEASURED WHERE IT IS RECOMBINED WITH THE OTHER PARTIAL MEASUREMENT BEAM WHICH HAS ALSO BEEN REVERSED IN DIRECTION AND RETURNED. THE RECOMBINED MEASUREMENT BEAM IS THEN RETURNED TO THE FIRST OPTICAL DIVIDER WHERE IT COMBINES WITH THE OUTGOING REFERENCE BEAM FOLLOWING THE LATTER''S REVERSAL AND RETURN TO FORM AN OUTGOING LIGHT BEAM WHICH IS DIFFERENTLY INTENSITY MODULATED OVER THE TWO HALVES OF ITS CROSS-SECTION, AND THESE TWO HALVES ARE ADMITTED RESPECTIVELY TO PHOTO-DETECTORS WHICH MEASURE THEIR INTENSITY.
Inventors
- 👤 Francois Mottier
Bibliographic Details
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