US3555950A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for cutting a drawing in a layer of synthetic material
Assignee: US Philips Corp
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Filing: 1969-06-09
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Granted: 1971-01-19
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Expires: 1989-06-09
Abstract
Abstract In manufacturing patterns such as photomasks, contours are cut in a foil by means of a cutting tool, after which the material of the foil situated inside or outside the contours is removed. According to the invention, a cutter is used which is preferably rotationally symmetrical, the cutting part of which extends at right angles to the plane of the foil and is heated during cutting of the foil to facilitate the cutting operation. Any contours may be cut by means of this tool which is insensitive to the direction of cutting.
Inventors
- 👤 Thomas Gerardus Gijsbers
- 👤 Leopold Michael Lamber Leblans
- 👤 Henricus Petrus Cornel Daniels
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:12
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; B; B05; B05C; B05C17/00; B05C17/06; B26; B26F; B26F3/00; B26F3/06; B26F3/08; B43; B43L; B43L13/00; B43L13/001; Y; Y10; Y10S; Y10S83/00; Y10S83/929; Y10S83/956; Y10T; Y10T83/00; Y10T83/02; Y10T83/0333; Y10T83/0348; Y10T83/283; Y10T83/293
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
150 words
An apparatus for providing a pattern in a multilayer plate for use in the manufacture of photomasks, the outermost layer of said plate being a foil of synthetic material, said apparatus comprising a table for supporting said plate, a cutting tool supported in movable relation with respect to said table for cutting said pattern, means for supporting said cutting tool and controlling its movement with relation to said table, said cutting tool comprising a holder, a foot member connected to said holder having a central aperture therein, a cutting part carried within said holder having a tip projecting through said aperture and having the longitudinal axis of said tip arranged perpendicular to the plane of said plate, means for adjusting the height of said cutting part with respect to said table, and means for heating said cutting part so that the heat produced thereby may be transmitted to said foil.
Claim 2
Independent Claim
150 words
An apparatus for providing a pattern in a multilayer plate for use in the manufacture of photomasks, the outermost layer of said plate being a foil of synthetic material, said apparatus comprising a table for supporting said plate, a cutting tool supported in movable relation with respect to said table for cutting said pattern, means for supporting said cutting tool and controlling its movement with relation to said table, said cutting tool comprising a holder, a foot member connected to said holder having a central aperture therein, a cutting part carried within said holder having a tip projecting through said aperture and having the longitudinal axis of said tip arranged perpendicular to the plane of said plate, means for adjusting the height of said cutting part with respect to said table, and means for heating said cutting part so that the heat produced thereby may be transmitted to said foil.
Claim 3
Dependent Claim
22 words
The apparatus according to claim 1 wherein said tip of said cutting part is substantially symmetrical with respect to its main axis.
Claim 4
Dependent Claim
20 words
The apparatus according to claim 2 where said tip of said cutting part projecting into said foil consists of diamond.
Claim 5
Dependent Claim
65 words
The apparatus according to claim 1 wherein said means for supporting said cutting tool comprises a housing, a shaft movably carried within saId housing, said cutting tool being connected to one end thereof, means for axially adjusting said shaft for affecting the height of said cutting part and means connected to said housing for effecting movement of said cutting tool with respect to said plate.
Claim 6
Dependent Claim
33 words
The apparatus according to claim 4 wherein said shaft is connected to two points along its longitudinal dimension to diaphragms, each of said diaphragms being contained within said housing at their outer circumference.
Claim 7
Dependent Claim
17 words
The apparatus according to claim 1 wherein said means for heating said cutting part is electrical means.
Claim 8
Dependent Claim
36 words
The apparatus according to claim 6 wherein said electrical means for heating said cutting part comprises an electrical heating element connected to said cutting part and a source of electrical power for activating said electrical element.
Claim 9
Dependent Claim
18 words
The apparatus according to claim 1 wherein said means for heating said cutting part comprises vibrations produced ultrasonically.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-18 | 1974-07-20 | 1975-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-18 | 1978-07-20 | 1979-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-18 | 1982-07-20 | 1983-01-19 | $7700.00 | Window Closed / Lapsed |