Television system for checking mask registration

Claim 1

A method for checking the registration of a pattern on a first medium with a pattern on a second medium, the steps comprising: mounting the first medium in a lateral spaced relationship to the second medium; generating a first color electronic image signal of the first medium; generating a second color electronic image signal of the second medium; displaying an image of the pattern on the first medium in superimposed relationship to an image of the pattern on the second medium, the image of the pattern on the first medium projecting the first color, and the image of the pattern on the second medium projecting the second color; and aligning the image of the first medium with the image of the second medium in a predetermined congruent relationship to check the registration of the pattern on the first medium with the pattern on the second medium.

Claim 2

A method for checking the registration of a pattern on a first medium with a pattern on a second medium, the steps comprising: mounting the first medium in a lateral spaced relationship to the second medium; generating a first color electronic image signal of the first medium; generating a second color electronic image signal of the second medium; displaying an image of the pattern on the first medium in superimposed relationship to an image of the pattern on the second medium, the image of the pattern on the first medium projecting the first color, and the image of the pattern on the second medium projecting the second color; and aligning the image of the first medium with the image of the second medium in a predetermined congruent relationship to check the registration of the pattern on the first medium with the pattern on the second medium.

Claim 5

A method for checking the degree of registration of patterns of photographic masks, comprising: mounting a plurality of said photographic masks in positions relatively spaced from one another; illuminating the surface of each of the masks with light from a respective different color; generating a color electronic image signal indicative of each mask to project an image of the associated pattern; aligning a predetermined fixed point on the image of one mask with a predetermined fixed point on the image of the other masks so that the masks are congruently disposed; and displaying the images of the pattern generated by the electronic signal to show a composite image of all the individual pAtterns on the masks, the image of the respective pattern distinguished by the different color, to determine the degree of registration of the patterns.

Claim 6

A method for checking the degree of registration of patterns of photographic masks, comprising: mounting a plurality of said photographic masks in positions relatively spaced from one another; illuminating the surface of each of the masks with light from a respective different color; generating a color electronic image signal indicative of each mask to project an image of the associated pattern; aligning a predetermined fixed point on the image of one mask with a predetermined fixed point on the image of the other masks so that the masks are congruently disposed; and displaying the images of the pattern generated by the electronic signal to show a composite image of all the individual pAtterns on the masks, the image of the respective pattern distinguished by the different color, to determine the degree of registration of the patterns.

Claim 7

A method for checking the degree of registration of a pattern on a plurality of photographic masks, comprising: supporting a plurality of photographic masks in alignment with respective optical paths of a plurality of color television cameras; mounting the masks for movement to position a fixed point of each mask in the optical path of said cameras; generating an electronic image signal of a different color from each of the cameras indicative of the appearance of the pattern on the associated masks; connecting the output signals from said cameras to predetermined inputs of a television receiver to display a composite, multicolored image of corresponding fixed points on each mask positioned in the optical paths of said cameras, said multicolored image generated as the different color for each mask; aligning the fixed point of a first mask into coincidence with the fixed point of the other masks so that the masks are congruently disposed; and displaying a composite, multicolored image of the remaining areas on said masks to check the registration of the pattern on the first mask with the pattern of the other masks.

Claim 8

A method for checking the degree of registration of a pattern on a plurality of photographic masks, comprising: supporting a plurality of photographic masks in alignment with respective optical paths of a plurality of color television cameras; mounting the masks for movement to position a fixed point of each mask in the optical path of said cameras; generating an electronic image signal of a different color from each of the cameras indicative of the appearance of the pattern on the associated masks; connecting the output signals from said cameras to predetermined inputs of a television receiver to display a composite, multicolored image of corresponding fixed points on each mask positioned in the optical paths of said cameras, said multicolored image generated as the different color for each mask; aligning the fixed point of a first mask into coincidence with the fixed point of the other masks so that the masks are congruently disposed; and displaying a composite, multicolored image of the remaining areas on said masks to check the registration of the pattern on the first mask with the pattern of the other masks.

Claim 9

A method for checking the degree of registration of a pattern on a first photographic mask with a pattern on a second photographic mask, the masks mounted in spaced relationship, comprising: supporting said first mask in the optical path of a first camera having an output for generating a first color and supporting said second mask in the optical path of a second camera having an output for generating a second color; mounting said masks for movement to position selected predetermined areas on said masks in the optical paths of said cameras; directing light of said respective first and second colors onto said respective first and second masks to illuminate said masks with said respective first and second colors; connecting the outputs of said cameras to respective first and second inputs of a color television receiver to display images of said first and second colors, respectively, to exhibit a composite, two color image of said preselected mask areas; moving each of said masks to bring the respective selected areas of each of said masks into a fixed relationship on said receiver; and displaying the remaining areas of said masks on said receiver to exhibit a composite two color image of the patterns of said mask areas to show their degree of registration.

Claim 10

A method for checking the degree of registration of a pattern on a first photographic mask with a pattern on a second photographic mask, the masks mounted in spaced relationship, comprising: supporting said first mask in the optical path of a first camera having an output for generating a first color and supporting said second mask in the optical path of a second camera having an output for generating a second color; mounting said masks for movement to position selected predetermined areas on said masks in the optical paths of said cameras; directing light of said respective first and second colors onto said respective first and second masks to illuminate said masks with said respective first and second colors; connecting the outputs of said cameras to respective first and second inputs of a color television receiver to display images of said first and second colors, respectively, to exhibit a composite, two color image of said preselected mask areas; moving each of said masks to bring the respective selected areas of each of said masks into a fixed relationship on said receiver; and displaying the remaining areas of said masks on said receiver to exhibit a composite two color image of the patterns of said mask areas to show their degree of registration.

Claim 11

A method for checking the degree of registration of a pattern on a first photographic mask with a pattern on a second photographic mask, the masks mounted in spaced relationship, comprising: supporting said first mask in the optical path of a first camera and supporting said second mask in the optical path of a second camera, the respective first and second cameras having an output for generating a respective first and second color; mounting said first and second masks for movement to position selected areas on said masks in the optical paths of said cameras; projecting an image from said selected areas on said masks indicative of the color of the masks to said respective cameras; connecting the outputs of said cameras to first and second inputs, respectively, of a color television receiver to generate a composite, two color image of said mask areas; moving first lenses into the optical paths of said cameras to display an image of the entire surface area of said masks on said receiver, said displaying enabling the initial alignment of said first and second masks; and moving second lenses into the optical paths of said cameras to change the focal lengths thereof to display an image of selected areas of said masks on said receiver, said display indicating the degree of registration of the pattern on said fist first mask with the pattern on said second mask.

Claim 12

A method for checking the degree of registration of a pattern on a first photographic mask with a pattern on a second photographic mask, the masks mounted in spaced relationship, comprising: supporting said first mask in the optical path of a first camera and supporting said second mask in the optical path of a second camera, the respective first and second cameras having an output for generating a respective first and second color; mounting said first and second masks for movement to position selected areas on said masks in the optical paths of said cameras; projecting an image from said selected areas on said masks indicative of the color of the masks to said respective cameras; connecting the outputs of said cameras to first and second inputs, respectively, of a color television receiver to generate a composite, two color image of said mask areas; moving first lenses into the optical paths of said cameras to display an image of the entire surface area of said masks on said receiver, said displaying enabling the initial alignment of said first and second masks; and moving second lenses into the optical paths of said cameras to change the focal lengths thereof to display an image of selected areas of said masks on said receiver, said display indicating the degree of registration of the pattern on said fist first mask with the pattern on said second mask.