US3540871A
Expired / Lapsed
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Method for maintaining the uniformity of vapor grown polycrystalline silicon
Assignee: Texas Instruments Inc
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Filing: 1967-12-15
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Granted: 1970-11-17
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Expires: 1987-12-15
Abstract
No abstract record available.
Inventors
- 👤 Lawrence D Dyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:42
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/035; C23; C23C; C23C16/00; C23C16/22; C23C16/24; C30B25/00; C30B25/02; Y; Y10; Y10S; Y10S148/00; Y10S148/025; Y10S148/051; Y10S148/122
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-11-16 | 1974-05-18 | 1974-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-11-16 | 1978-05-18 | 1978-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-11-16 | 1982-05-18 | 1982-11-17 | $7700.00 | Window Closed / Lapsed |