US3536892A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for thermal processing of semiconductor wafers
Assignee: Siemens AG
•
Filing: 1968-04-04
•
Granted: 1970-10-27
•
Expires: 1988-04-04
Abstract
No abstract record available.
Inventors
- 👤 Albert Walther
- 👤 Erhard Sussmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:14
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/46
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US606792A
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US1514228A
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US1547647A
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US2691717A
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US2933586A
Cited
US3151006A
Cited
US3381114A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-10-26 | 1974-04-27 | 1974-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-10-26 | 1978-04-27 | 1978-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-10-26 | 1982-04-27 | 1982-10-27 | $7700.00 | Window Closed / Lapsed |