Patent EP0446463A1 successfully refreshed from Google Patents.
US3525680A
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Method and apparatus for the radio frequency sputtering of dielectric materials
Assignee: International Business Machines Corp
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Filing: 1965-12-20
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Granted: 1970-08-25
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Expires: 1985-12-20
Abstract
No abstract record available.
Inventors
- 👤 Pieter D Davidse
- 👤 Walter J Kleinfelder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/0021; C23C14/0036; C23C14/35; H; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/08; H01G4/085; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-08-24 | 1974-02-23 | 1974-08-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-08-24 | 1978-02-23 | 1978-08-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-08-24 | 1982-02-23 | 1982-08-25 | $7700.00 | Window Closed / Lapsed |