US3520685A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etching silicon dioxide by direct photolysis
Assignee: General Electric Co
•
Filing: 1967-05-29
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Granted: 1970-07-14
•
Expires: 1987-05-29
Abstract
No abstract record available.
Inventors
- 👤 Donald L Schaefer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 13:12
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; C; C04; C04B; C04B41/00; C04B41/53; C04B41/5338; C04B41/5353
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US2875046A
Cited
US2841477A
Cited
US3122463A
Cited
US3271180A
Cited
US3255005A
Cited
US3346384A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-07-13 | 1974-01-12 | 1974-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-07-13 | 1978-01-12 | 1978-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-07-13 | 1982-01-12 | 1982-07-14 | $7700.00 | Window Closed / Lapsed |