US3519504A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for etching silicon nitride films with sharp edge definition
Assignee: International Business Machines Corp
•
Filing: 1967-01-13
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Granted: 1970-07-07
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Expires: 1987-01-13
Abstract
No abstract record available.
Inventors
- 👤 Jerome J Cuomo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 01:26
CPC Classifications
H; H10; H10P; H10P95/00; C; C23; C23C; C23C14/00; C23C14/22; C23C16/00; C23C16/06; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10W; H10W20/00; H10W20/40; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/106; Y10S148/113; Y10S148/114; Y10S148/118; Y10S148/148
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US3193418A
Cited
US3122450A
Cited
US3165430A
Cited
US3382099A
Cited
US3350222A
Cited
US3402081A
Cited
US3406050A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-07-06 | 1974-01-05 | 1974-07-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-07-06 | 1978-01-05 | 1978-07-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-07-06 | 1982-01-05 | 1982-07-07 | $7700.00 | Window Closed / Lapsed |