US3489564A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photolytic etching of silicon dioxide
Assignee: General Electric Co
•
Filing: 1967-05-29
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Granted: 1970-01-13
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Expires: 1987-05-29
Abstract
No abstract record available.
Inventors
- 👤 Donald L Schaefer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:12
CPC Classifications
C; C03; C03C; C03C23/00; C03C23/0005; C03C23/002; C03C15/00; C03C23/0015; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0041
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US2875046A
Cited
US2841477A
Cited
US3122463A
Cited
US3271180A
Cited
US3255005A
Cited
US3346384A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-01-12 | 1973-07-14 | 1974-01-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-01-12 | 1977-07-14 | 1978-01-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-01-12 | 1981-07-14 | 1982-01-13 | $7700.00 | Window Closed / Lapsed |