US3463715A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of cathodically sputtering a layer of silicon having a reduced resistivity
Assignee: Northrop Grumman Space and Mission Systems Corp
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Filing: 1966-07-07
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Granted: 1969-08-26
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Expires: 1986-07-07
Abstract
No abstract record available.
Inventors
- 👤 Murray Bloom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:53
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/58; C23C14/5806; C23C14/584; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; Y; Y10; Y10S; Y10S148/00; Y10S148/118; Y10S148/122; Y10S148/158
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-08-25 | 1973-02-24 | 1973-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-08-25 | 1977-02-24 | 1977-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-08-25 | 1981-02-24 | 1981-08-26 | $7700.00 | Window Closed / Lapsed |