US3447072A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cold cathode penning type gauge for monitoring vacuum level in a sputtering process
Assignee: National Research Corp
•
Filing: 1966-12-22
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Granted: 1969-05-27
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Expires: 1986-12-22
Abstract
No abstract record available.
Inventors
- 👤 Deane P Sheldon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:10
CPC Classifications
H; H01; H01J; H01J41/00; H01J41/02; H01J41/06
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US2643342A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-05-26 | 1972-11-25 | 1973-05-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-05-26 | 1976-11-25 | 1977-05-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-05-26 | 1980-11-25 | 1981-05-27 | $7700.00 | Window Closed / Lapsed |