US3437576A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Production of a cooling module for microelectronic circuits by cathodic sputtering
Assignee: United States Department of the Air Force
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Filing: 1966-07-11
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Granted: 1969-04-08
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Expires: 1986-07-11
Abstract
No abstract record available.
Inventors
- 👤 Richard Nelson
- 👤 John E Mccormick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H10; H10N; H10N10/00; H10N10/01; H10W; H10W40/00; H10W40/20; H10W40/28
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
145 words
THE METHOD OF PRODUCING A COOLING MODULE FOR MICROELECTRONIC CIRCUITS, SAID PROCESS COMPRISING: (1) SPUTTER-DEPOSITING AN ELECTRICAL INSULATING METAL OXIDE DIRECTLY UPON THE MICROELECTRONIC CIRCUIT TO BE COOLED, (2) MASKING FOR DEPOSITION OF MATERIAL ON A SELECTED UNMASKED AREA, (3) FORMING A COLD JUNCTION STRAP UNIT BY SPUTTERING, DEPOSITION OF A METALLIC LAYER OF HIGH ELECTRICAL AND THERMAL CONDUCTIVITY, (4) MASKING ALTERNATELY PORTIONS OF SAID COLD JUNCTION STRAP, (5) SPUTTER-DEPOSITING SIDE BY SIDE UPON SAID COLD JUNCTION STRAP AND IN SEPARATE OPERATIONS AN ELEMENT COMPRISING A THIN LAYER OF P TYPE THERMOELECTRIC MATERIAL AND AN ELEMENT COMPRISING A THIN LAYER OF N TYPE THERMOELECTRIC MATERIAL, (6) MASKING ALTERNATELY SAID P TYPE ELEMENT AND SAID N TYPE ELEMENT, AND (7) SPUTTER DEPOSITING HOT JUNCTION STRAPS UPON BOTH P AND N TYPE ELEMENTS AND FINALLY PROVIDING A THIN FILM OF ELECTRICAL INSULATION OVER THE MODULE THUS PRODUCED.
Claim 2
Independent Claim
145 words
THE METHOD OF PRODUCING A COOLING MODULE FOR MICROELECTRONIC CIRCUITS, SAID PROCESS COMPRISING: (1) SPUTTER-DEPOSITING AN ELECTRICAL INSULATING METAL OXIDE DIRECTLY UPON THE MICROELECTRONIC CIRCUIT TO BE COOLED, (2) MASKING FOR DEPOSITION OF MATERIAL ON A SELECTED UNMASKED AREA, (3) FORMING A COLD JUNCTION STRAP UNIT BY SPUTTERING, DEPOSITION OF A METALLIC LAYER OF HIGH ELECTRICAL AND THERMAL CONDUCTIVITY, (4) MASKING ALTERNATELY PORTIONS OF SAID COLD JUNCTION STRAP, (5) SPUTTER-DEPOSITING SIDE BY SIDE UPON SAID COLD JUNCTION STRAP AND IN SEPARATE OPERATIONS AN ELEMENT COMPRISING A THIN LAYER OF P TYPE THERMOELECTRIC MATERIAL AND AN ELEMENT COMPRISING A THIN LAYER OF N TYPE THERMOELECTRIC MATERIAL, (6) MASKING ALTERNATELY SAID P TYPE ELEMENT AND SAID N TYPE ELEMENT, AND (7) SPUTTER DEPOSITING HOT JUNCTION STRAPS UPON BOTH P AND N TYPE ELEMENTS AND FINALLY PROVIDING A THIN FILM OF ELECTRICAL INSULATION OVER THE MODULE THUS PRODUCED.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-04-07 | 1972-10-07 | 1973-04-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-04-07 | 1976-10-07 | 1977-04-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-04-07 | 1980-10-07 | 1981-04-08 | $7700.00 | Window Closed / Lapsed |