Impedance matching network for gas reaction apparatus

Claim 1

IN AN APPARATUSS FOR REACTING A GAS WITH A NONGASEOUS SUBSTANCE, INCLUDING AN RF SOURCE AND MEANS TO GENERATE AN RF FIELD FOR IONIZING THE GAS, THE COMBINATION WITH SAID SOURCE AND SAID FIELD GENERATING MEANS OF A COUPLING NETWORK TO TRANSFER RF POWER FROM SOURCE TO GAS THROUGH THE MEDIUM OF SAID FIELD GENERATING MEANS, SAID COUPLING NETWORK COMPRISING: (A) A VARIABLE CAPACITOR TO COMPENSATE FOR CHANGES IN THE LOAD PRESENTED BY SAID FIELD GENERATING MEANS, (B) TRANSFORMER MEANS TO INCREASE THE EFFECTIVE VALUE OF SAID CAPACITOR AND TO TRANSFORM THE RESISTIVE COMPONENT OF THE LOAD IMPEDANCE TO A VALUE MORE NEARLY EQUAL TO THAT OF THE SOURCE, SAID TRANSFORMER MEANS HAVING A PRIMARY WINDING COUPLED TO SAID SOURCE, A FIRST SECONDARY WINDING COUPLED TO SAID FIELD GENERATING MEANS, AND A SECOND SECONDARY WINDING COUPLED TO SAID CAPACITOR, AND (C) ANOTHER VARIABLE CAPACITOR CONNECTED IN SERIES BETWEEN SAID SOURCE AND SAID PRIMARY WINDING TO COMPENSATE FOR THE INDUCTANCE OF SAID PRIMARY WINDING.