US3429756A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the preparation of inorganic single crystal and polycrystalline electronic materials
Assignee: Monsanto Co
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Filing: 1965-02-05
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Granted: 1969-02-25
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Expires: 1985-02-05
Abstract
No abstract record available.
Inventors
- 👤 Warren O Groves
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:42
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/126; C; C23; C23F; C23F1/00; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646; H10P95/00; Y; Y10; Y10S; Y10S117/00; Y10S117/915; Y10S148/00; Y10S148/051; Y10S148/072; Y10S148/122; Y10S148/135
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
90 words
PROCESS FOR THE PREPARATION OF SEMICONDUCTOR SINGLE CRYSTALS HAVING A SUBSTANTIALLY SMOOTH, FLAT, UNIFORM AND DAMAGE-FREE SURFACE, AND BEING SELECTED FROM THE GROUP CONSISTING OF III-V COMPOUNDS AND ALLOYS THEREOF WHICH COMPRISES IMMERSING AN EPITAXIAL FILM OF ONE OF SAID SINGLE CRYSTALS DEPOSITED ON A COMPATIBLE SUBSTRATE MATERIAL WHICH IS SELECTED FROM THE SAME GROUP AS SAID SINGLE CRYSTALS, IN AN ETCHING SOLUTION IN WHICH SAID SUBSTRATE MATERIAL HAS A HIGHER SOLUTION RATE THAN SAID EPITAXIAL SINGLE CRYSTAL AND IS SELECTIVELY DISSOLVED AND SIAD EPITAXIAL SINGLE CRYSTAL IS ESSENTIALLY UNAFFECTED.
Claim 2
Dependent Claim
90 words
PROCESS FOR THE PREPARATION OF SEMICONDUCTOR SINGLE CRYSTALS HAVING A SUBSTANTIALLY SMOOTH, FLAT, UNIFORM AND DAMAGE-FREE SURFACE, AND BEING SELECTED FROM THE GROUP CONSISTING OF III-V COMPOUNDS AND ALLOYS THEREOF WHICH COMPRISES IMMERSING AN EPITAXIAL FILM OF ONE OF SAID SINGLE CRYSTALS DEPOSITED ON A COMPATIBLE SUBSTRATE MATERIAL WHICH IS SELECTED FROM THE SAME GROUP AS SAID SINGLE CRYSTALS, IN AN ETCHING SOLUTION IN WHICH SAID SUBSTRATE MATERIAL HAS A HIGHER SOLUTION RATE THAN SAID EPITAXIAL SINGLE CRYSTAL AND IS SELECTIVELY DISSOLVED AND SIAD EPITAXIAL SINGLE CRYSTAL IS ESSENTIALLY UNAFFECTED.
References Cited (Backward Citations)
US2847287A
Cited
US3224911A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-02-25 | 1972-08-26 | 1973-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-02-25 | 1976-08-26 | 1977-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-02-25 | 1980-08-26 | 1981-02-25 | $7700.00 | Window Closed / Lapsed |