US3404271A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for inspecting semiconductor devices using electron mirror microscopy
Assignee: Sprague Electric Co
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Filing: 1966-11-02
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Granted: 1968-10-01
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Expires: 1986-11-02
Abstract
No abstract record available.
Inventors
- 👤 Lehovec Kurt
- 👤 Schier Hans
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:29
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2653; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
91 words
A PROCESS FOR NONDESTRUCTIVE INSPECTION OF SEMI-CONDUCTOR DEVICES BY MEANS OF ELECTRON MIRROR MICROSCOPY COMPRISING THE STEPS OF DIRECTING A BEAM OF ELECTRONS TOWARDS A SURFACE OF SAID DEVICE WHICH IS BIASED SLIGHTLY NEGATIVE WITH RESPECT TO THE SOURCE OF SAID ELECTRONS SO AS TO REFLECT THEM IN FRONT OF SAID SURFACE AND PROVIDE AN IMAGE THEREOF, ENERGIZING SAID SURFACE BY EXPOSING SAID SURFACE TO RADIATION SO AS TO PRODUCE ELECTRICAL POTENTIAL VARIATIONS THEREON, AND ASCERTAINING THE ELECTRON DISTRIBUTION OF SAID REFLECTED ELECTRONS TO DETERMINE THE ELECTRICAL CHARACTERISTICS OF SAID DEVICE.
Claim 2
Dependent Claim
91 words
A PROCESS FOR NONDESTRUCTIVE INSPECTION OF SEMI-CONDUCTOR DEVICES BY MEANS OF ELECTRON MIRROR MICROSCOPY COMPRISING THE STEPS OF DIRECTING A BEAM OF ELECTRONS TOWARDS A SURFACE OF SAID DEVICE WHICH IS BIASED SLIGHTLY NEGATIVE WITH RESPECT TO THE SOURCE OF SAID ELECTRONS SO AS TO REFLECT THEM IN FRONT OF SAID SURFACE AND PROVIDE AN IMAGE THEREOF, ENERGIZING SAID SURFACE BY EXPOSING SAID SURFACE TO RADIATION SO AS TO PRODUCE ELECTRICAL POTENTIAL VARIATIONS THEREON, AND ASCERTAINING THE ELECTRON DISTRIBUTION OF SAID REFLECTED ELECTRONS TO DETERMINE THE ELECTRICAL CHARACTERISTICS OF SAID DEVICE.
References Cited (Backward Citations)
US2901627A
Cited
US3047719A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-10-01 | 1972-04-01 | 1972-10-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-10-01 | 1976-04-01 | 1976-10-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-10-01 | 1980-04-01 | 1980-10-01 | $7700.00 | Window Closed / Lapsed |