US3400070A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High efficiency plasma processing head including a diffuser having an expanding diameter
Assignee: Hercules LLC
•
Filing: 1965-06-14
•
Granted: 1968-09-03
•
Expires: 1985-06-14
Abstract
No abstract record available.
Inventors
- 👤 Naff John Tom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 08:29
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/26; H05H1/32; B; B23; B23K; B23K10/00; H05H1/48; H05H1/50
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
115 words
IN PLASMA PROCESSING APPARATUS, STRUCTURE INCLUDING ELECTRODE ELEMENTS EACH FORMING A PASSAGE FOR PASSING THE FLOW OF GAS THERETHROUGH AND FOR RECEPTION OF AN ARC DISCHARGE PATTERN PENETRATING SAID ELEMENT PASSAGES IN THE PATH OF SAID FLOW, SAID PASSAGES HAVING OPPOSED ENTRANCES AND EXITS DOWNSTREAM OF SAID ENTRANCES AND MEANS TO CONDUCT ELECTRICAL CURRENT TO SAID ELEMENTS TO CREATE SAID ARC DISCHARGE PATTERN, SAID PASSAGE IN AT LEAST ONE ELEMENT INCLUDING A RELATIVELY REDUCED CROSS SECTION THROAT REGION DIRECTLY DOWNSTREAM OF THE ENTRANCE OF THE ELEMENT PASSAGE, AND A RELATIVELY INCREASED CROSS SECTIION DIFFUSER REGION DIRECTLY DOWNSTREAM OF THE THROAT, THE ARC HAVING LOCI OF ATTACHMENT TO AT LEAST ONE ELEMENT AT SAID DIFFUSER REGION.
Claim 2
Dependent Claim
115 words
IN PLASMA PROCESSING APPARATUS, STRUCTURE INCLUDING ELECTRODE ELEMENTS EACH FORMING A PASSAGE FOR PASSING THE FLOW OF GAS THERETHROUGH AND FOR RECEPTION OF AN ARC DISCHARGE PATTERN PENETRATING SAID ELEMENT PASSAGES IN THE PATH OF SAID FLOW, SAID PASSAGES HAVING OPPOSED ENTRANCES AND EXITS DOWNSTREAM OF SAID ENTRANCES AND MEANS TO CONDUCT ELECTRICAL CURRENT TO SAID ELEMENTS TO CREATE SAID ARC DISCHARGE PATTERN, SAID PASSAGE IN AT LEAST ONE ELEMENT INCLUDING A RELATIVELY REDUCED CROSS SECTION THROAT REGION DIRECTLY DOWNSTREAM OF THE ENTRANCE OF THE ELEMENT PASSAGE, AND A RELATIVELY INCREASED CROSS SECTIION DIFFUSER REGION DIRECTLY DOWNSTREAM OF THE THROAT, THE ARC HAVING LOCI OF ATTACHMENT TO AT LEAST ONE ELEMENT AT SAID DIFFUSER REGION.
Claim 3
Dependent Claim
34 words
THE COMBINATION OF CLAIM 1 IN WHICH THE ARC HAS LOCI OF ATTACHMENT TO THE ANODE AND CATHODE ELEMENTS, AND INCLUDING MAGNETIC MEANS TO EFFECT ROTATION OF AT LEAST ONE OF SAID ATTACHMENT LOCI.
References Cited (Backward Citations)
DE31337C
Cited
US2960614A
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US2892114A
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DE1153463B
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DE1097053B
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US2920236A
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US3132996A
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FR1395362A
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US3360682A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-09-03 | 1972-03-04 | 1972-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-09-03 | 1976-03-04 | 1976-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-09-03 | 1980-03-04 | 1980-09-03 | $7700.00 | Window Closed / Lapsed |