US3388053A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of preparing a film resistor by sputtering a ternary alloy of tin, antimony and indium in the presence of oxygen
Assignee: AT&T Inc
•
Filing: 1965-06-03
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Granted: 1968-06-11
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Expires: 1985-06-03
Abstract
No abstract record available.
Inventors
- 👤 William R Sinciair
- 👤 Donald W Stillinger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 02:29
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; C; C22; C22C; C22C13/00; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; H01B; H01B1/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
66 words
A METHOD FOR THE FABRICATION OF A RESISTIVE OXIDE FILM WHICH COMPRISES THE STEPS OF REACTIVELY SPUTTERING A TERNARY ALLOY HAVING THE GENERAL FORMULA SNXSBYINZ WHEREIN X RANGES FROM 96.6-84-0 ATOMIC PERCENT, Y RANGES FROM 3.3-15 ATOMIC PERCENT AND Z RANGES FROM 0.1-1 ATOMIC PERCENT, UPON A SUBSTRATE IN THE PRESENCE OF OXYGEN AND HEATING THE RESULTANT ASSEMBLY AT A TEMPERATURE WITHIN THE RANGE OF 600-1000*C.
Claim 2
Independent Claim
66 words
A METHOD FOR THE FABRICATION OF A RESISTIVE OXIDE FILM WHICH COMPRISES THE STEPS OF REACTIVELY SPUTTERING A TERNARY ALLOY HAVING THE GENERAL FORMULA SNXSBYINZ WHEREIN X RANGES FROM 96.6-84-0 ATOMIC PERCENT, Y RANGES FROM 3.3-15 ATOMIC PERCENT AND Z RANGES FROM 0.1-1 ATOMIC PERCENT, UPON A SUBSTRATE IN THE PRESENCE OF OXYGEN AND HEATING THE RESULTANT ASSEMBLY AT A TEMPERATURE WITHIN THE RANGE OF 600-1000*C.
References Cited (Backward Citations)
US3073770A
Cited
US3139396A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-06-11 | 1971-12-11 | 1972-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-06-11 | 1975-12-11 | 1976-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-06-11 | 1979-12-11 | 1980-06-11 | $7700.00 | Window Closed / Lapsed |