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US3386853A Expired / Lapsed US ⏱️ 0.0 years remaining

Spiral vacuum deposition apparatus and method

Assignee: Individual
•
Filing: 1965-12-28
•
Granted: 1968-06-04
•
Expires: 1985-12-28
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Abstract

No abstract record available.

Inventors

  • 👤 Paul E Oberg
  • 👤 Maynard C Paul

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 21:57
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/243; C23C14/246

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 89 words
A METHOD OF VACUUM DEPOSITING MATERIAL UPON A SUBSTRATE FREE OF LARGER PARTICLES COMPRISING THE STEPS OF: (A) SUBJECTING AN ENCLOSED CURVED RESISTANCE HEATING ELEMENT HAVING A PLURALITY OF CONVOLUTIONS ON A DIMINISHING RADIUS AND CONTAINING A MATERIAL TO BE EVAPORATED TO A SOURCE OF ENERGY IN ORDER TO RAISE THE TEMPERATURE OF SAID MATERIAL TO ITS EVAPORATING TEMPERATURE WHEREBY SAID MATERIAL IS DIRECTED ALONG THE HEATING ELEMENT ENCLOSURE IN A TORTUOUS PATH BY IMPINGING UPON SAID ELEMENT AND BEING RE-EVAPORATED THEREFROM AS THE EVAPORANT PROCEEDS TOWARD AN EXIT.
Claim 2
Independent Claim 89 words
A METHOD OF VACUUM DEPOSITING MATERIAL UPON A SUBSTRATE FREE OF LARGER PARTICLES COMPRISING THE STEPS OF: (A) SUBJECTING AN ENCLOSED CURVED RESISTANCE HEATING ELEMENT HAVING A PLURALITY OF CONVOLUTIONS ON A DIMINISHING RADIUS AND CONTAINING A MATERIAL TO BE EVAPORATED TO A SOURCE OF ENERGY IN ORDER TO RAISE THE TEMPERATURE OF SAID MATERIAL TO ITS EVAPORATING TEMPERATURE WHEREBY SAID MATERIAL IS DIRECTED ALONG THE HEATING ELEMENT ENCLOSURE IN A TORTUOUS PATH BY IMPINGING UPON SAID ELEMENT AND BEING RE-EVAPORATED THEREFROM AS THE EVAPORANT PROCEEDS TOWARD AN EXIT.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1971-06-04 1971-12-04 1972-06-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1975-06-04 1975-12-04 1976-06-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1979-06-04 1979-12-04 1980-06-04 $7700.00 Window Closed / Lapsed

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