Film deposition apparatus

Claim 1

IN DEPOSITION APPARATUS INCLUDING A VACUUM CHAMBER, MEANS FOR EVACUATING THE CHAMBER, AND DEPOSITION MONITOR MEANS, THE IMPROVEMENT COMPRISING: MELT SUPPORT MEANS AT LEAST PARTIALLY MOUNTED IN THE CHAMBER AROUND A VERTICALLY EXTENDING LONGITUDINAL AXIS, SAID SUPPORT MEANS ADAPTED TO CARRY A MELT FOR FORMING DEPOSITIVE VAPORS; MEANS MOUNTED IN THE CHAMBER FOR PROVIDING THERMAL ENERGY TO THE MELT; SUBSTANTIALLY CYLINDRICAL SUBSTRATE HOLDER MEANS INCLUDING SUBSTRATE SLED MOUNTING MEANS ON THE INNER SURFACE OF SAID HOLDER MEANS, SAID HOLDER MEANS ADAPTED TO CARRY SUBSTRATE SLEDS HAVING A PLURALITY OF SUBSTRATES MOUNTED THEREON; MEANS MOVABLY MOUNTING SAID HOLDER MEANS IN THE CHAMBER, THE LONGITUDINAL AXIS THEREOF BEING SUBSTANTIALLY THE LONGITUDINAL AXIS OF SAID MELT SUPPORT MEANS; MEANS FOR VERTICALLY MOVING SAID HOLDER MEANS, TO SEQUENTIALLY MOVE A GROUP OF SAID PLURALITY OF SUBSTRATES INTO SPACED RELATION WITH THE MELT FOR DEPOSITION ON THE GROUP OF SUBSTRATES, AND A PAIR OF VAPOR DEFLECTION PLATES MOUNTED IN THE CHAMBER IN GENERALLY HORIZONTALLY, SPACED RELATION, ABOVE AND BELOW THE MELT TO SHIELD THE PLURALITY OF SUBSTRATES OTHER THAN THE GROUP OF SUBSTRATES FROM DEPOSITIVE VAPORS FORMED BY THE MELT.