US3365378A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating film-forming metal capacitors
Assignee: International Business Machines Corp
•
Filing: 1963-12-31
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Granted: 1968-01-23
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Expires: 1983-12-31
Abstract
No abstract record available.
Inventors
- 👤 Leon I Maissel
- 👤 Charles L Standley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 00:17
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
132 words
THE PROCESS FOR PRODUCING THIN FILM CAPACITORS COMPRISING: DEPOSITING A THIN METALLIC FILM ON AN ELECTRICALLY NONCONDUCTIVE SUBSTRATE; MASKING THE FILM WITH A RESIST LAYER DEFINING A PREDETERMINING PATTERN; ETCHING AWAY PORTIONS OF THE FILM WHICH ARE EXPOSED THROUGH THE RESIST LAYER, THEREBY CREATING A PLURALITY OF FILMS HAVING EXPOSED EDGES; OXIDIZING TO A FIRST EXTENT EXPOSED EDGES OF THE FILMS, THEREBY CREATING AN OXIDE ON EXPOSED EDGES AND ON PORTIONS OF FACES OF THE FILMS IN CONTACT WITH THE RESIST LAYER, WHICH PORTIONS ARE ADJACENT THE EDGES; REMOVING THE RESIST LAYER, OXIDIZING OF THE FILMS TO A SECOND LESSER EXTENT, WHEREBY THICKNESSES OF OXIDE AT EXPOSED EDGES ARE GREATER THAN THE THICKNESSES OF THE OXIDES NEAR CENTERS OF A FACE, OF THE FILMS; AND DEPOSITING THIN FILM ELECTRODES ON OXIDE SURFACES.
Claim 2
Dependent Claim
132 words
THE PROCESS FOR PRODUCING THIN FILM CAPACITORS COMPRISING: DEPOSITING A THIN METALLIC FILM ON AN ELECTRICALLY NONCONDUCTIVE SUBSTRATE; MASKING THE FILM WITH A RESIST LAYER DEFINING A PREDETERMINING PATTERN; ETCHING AWAY PORTIONS OF THE FILM WHICH ARE EXPOSED THROUGH THE RESIST LAYER, THEREBY CREATING A PLURALITY OF FILMS HAVING EXPOSED EDGES; OXIDIZING TO A FIRST EXTENT EXPOSED EDGES OF THE FILMS, THEREBY CREATING AN OXIDE ON EXPOSED EDGES AND ON PORTIONS OF FACES OF THE FILMS IN CONTACT WITH THE RESIST LAYER, WHICH PORTIONS ARE ADJACENT THE EDGES; REMOVING THE RESIST LAYER, OXIDIZING OF THE FILMS TO A SECOND LESSER EXTENT, WHEREBY THICKNESSES OF OXIDE AT EXPOSED EDGES ARE GREATER THAN THE THICKNESSES OF THE OXIDES NEAR CENTERS OF A FACE, OF THE FILMS; AND DEPOSITING THIN FILM ELECTRODES ON OXIDE SURFACES.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-01-22 | 1971-07-24 | 1972-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-01-22 | 1975-07-24 | 1976-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-01-22 | 1979-07-24 | 1980-01-23 | $7700.00 | Window Closed / Lapsed |