Combined electron microscope and diffraction apparatus for the electronoptical inspection of the surfaces of objects

Claim 1

APPARATUS FOR THE ELECTRON-OPTICAL EXAMINATION OF AN OBJECT, INCLUDING AN ELECTRON DIFFRACTION APPARATUS HAVING A DIFFRACTION CHAMBER HOUSING WITHIN WHICH THE SAID OBJECT CAN BE SUPPORTED IN A VACUUM FOR EXAMINATION BY ELECTRON DIFFRACTION, AND AN ELECTRON EMISSION MICROSCOPE DISPOSED FOR EXAMINATION OF THE SURFACE OF SAID OBJECT AND HAVING AN ANODE, AND AN ANODE SCREEN IN PROXIMITY OF SAID OBJECT, A FLUORESCENT SCREEN REMOTE FROM SAID OBJECT AND A PROJECTIVE BETWEEN SAID OBJECT AND SAID FLUORESCENT SCREEN, SAID ANODE, ANODE SCREEN, FLUORESCENT SCREEN AND AT LEAST PART OF SAID PROJECTIVE BEING MAINTAINED AT A HIGH POSITIVE POTENTIAL RELATIVE TO SAID HOUSING, A HOUSING SURROUNDING SAID EMISSION MICROSCOPE AND ELECTRICALLY CONNECTED TO SAID DIFFRACTION CHAMBER HOUSING, AT LEAST ONE VIEWING WINDOW IN THE EMISSION MICROSCOPE HOUSING, AND AT LEAST ONE INSULATED HIGH-VOLTAGE DUCT PENETRATING SAID MICROSCOPE HOUSING FOR SUPPLYING SAID HIGH POTENTIAL.