US3347701A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for vapor deposition employing an electron beam
Assignee: Fujitsu Ltd
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Filing: 1964-02-03
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Granted: 1967-10-17
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Expires: 1984-02-03
Abstract
No abstract record available.
Inventors
- 👤 Yamagishi Kazuo
- 👤 Nakamura Masashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 23:35
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30; C23C14/54; C23C14/542; C23C14/544; H01J37/304; Y; Y10; Y10S; Y10S148/00; Y10S148/169
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
98 words
THE METHOD OF DEPOSITING SOLID LAYERS FROM VAPOR OF THE LAYER-FORMING MATERIAL, WHICH COMPRISES DIRECTING AN ELECTRON BEAM FROM A GRID-CONTROLLED ELECTRON GUN WITHIN A PROCESSING VESSEL ONTO A BODY OF MATERIAL TO PRODUCE THE VAPOR,SUBJECTING A SUBSTRATE TO THE VAPOR IN THE VESSEL FOR DEPOSITION OF CONDENSING MATERIAL ON THE SUBSTRATE, IMPRESING DURING VAPORIZATION A PULSATING GRID VOLTAGE UPON THE ELECTRON GUN TO MAKE THE ELECTRON-BEAM CURRENT PULSATE ACCORDINGLY, SENSING A GIVEN VAPORIZATION QUANTITY IN THE VESSEL, AND CONTROLLING THE PULSE VOLTAGE IN DEPENDENCE UPON THE SENSED QUANTITY TO MAINTAIN SUBSTANTIALLY UNIFORM QUALITY OF THE PRECIPITATING MATERIAL.
Claim 2
Independent Claim
98 words
THE METHOD OF DEPOSITING SOLID LAYERS FROM VAPOR OF THE LAYER-FORMING MATERIAL, WHICH COMPRISES DIRECTING AN ELECTRON BEAM FROM A GRID-CONTROLLED ELECTRON GUN WITHIN A PROCESSING VESSEL ONTO A BODY OF MATERIAL TO PRODUCE THE VAPOR,SUBJECTING A SUBSTRATE TO THE VAPOR IN THE VESSEL FOR DEPOSITION OF CONDENSING MATERIAL ON THE SUBSTRATE, IMPRESING DURING VAPORIZATION A PULSATING GRID VOLTAGE UPON THE ELECTRON GUN TO MAKE THE ELECTRON-BEAM CURRENT PULSATE ACCORDINGLY, SENSING A GIVEN VAPORIZATION QUANTITY IN THE VESSEL, AND CONTROLLING THE PULSE VOLTAGE IN DEPENDENCE UPON THE SENSED QUANTITY TO MAINTAIN SUBSTANTIALLY UNIFORM QUALITY OF THE PRECIPITATING MATERIAL.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-10-16 | 1971-04-17 | 1971-10-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-10-16 | 1975-04-17 | 1975-10-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-10-16 | 1979-04-17 | 1979-10-17 | $7700.00 | Window Closed / Lapsed |