US3335697A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for vapor deposition of silicon
Assignee: Siemens and Halske AG
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Filing: 1962-12-05
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Granted: 1967-08-15
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Expires: 1982-12-05
Abstract
No abstract record available.
Inventors
- 👤 Bischoff Friedrich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 10:16
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C01; C01B; C01B33/00; C01B33/02; C23; C23C; C23C16/00; C23C16/22; C30B30/00; C30B30/02
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
115 words
AN APPARATUS FOR PRODUCING HYPERPURE SILISON FOR ELECTRONIC SEMICONDUCTOR PURPOSES BY DECOMPOSITION OF A GASEOUS SILICON COMPOUND COMPRISING A VERTICALLY ELONGATED, CLOSED VESSEL, TWO ROD TERMINAL MEANS VERTICALLY SPACED FROM EACH OTHER WITHIN SAID VESSEL AND CONSISTING OF SUBSTANCE SELECTED FROM THE GROUP CONSISTING OF SILICON AND CARBN, AN ELONGATED CARRIER ROD OF SILICON HAVING ELECTRONIC PURITY AND HAVING A THICKNESS OF AT LEAST 0.2 MM., SAID ROD BEING CONDUCTIELY JOINED WITH SAID TERMINAL MEANS AND EXTENDING VERTICALLY IN SAID VESSEL; HEATING MEANS FOR HEATING SAID ROD T PROCESSING TEMPERATURE BETWEEN 900* AND 1400* C., SAID HEATING MEANS COMPRISING ELECTRIC CURRENT SUPPLY MEANS CONNECTED TO SAID TERMINAL MEANS FOR PASSING HEATING CURRENT THROUGH SAID ROD;
Claim 2
Independent Claim
115 words
AN APPARATUS FOR PRODUCING HYPERPURE SILISON FOR ELECTRONIC SEMICONDUCTOR PURPOSES BY DECOMPOSITION OF A GASEOUS SILICON COMPOUND COMPRISING A VERTICALLY ELONGATED, CLOSED VESSEL, TWO ROD TERMINAL MEANS VERTICALLY SPACED FROM EACH OTHER WITHIN SAID VESSEL AND CONSISTING OF SUBSTANCE SELECTED FROM THE GROUP CONSISTING OF SILICON AND CARBN, AN ELONGATED CARRIER ROD OF SILICON HAVING ELECTRONIC PURITY AND HAVING A THICKNESS OF AT LEAST 0.2 MM., SAID ROD BEING CONDUCTIELY JOINED WITH SAID TERMINAL MEANS AND EXTENDING VERTICALLY IN SAID VESSEL; HEATING MEANS FOR HEATING SAID ROD T PROCESSING TEMPERATURE BETWEEN 900* AND 1400* C., SAID HEATING MEANS COMPRISING ELECTRIC CURRENT SUPPLY MEANS CONNECTED TO SAID TERMINAL MEANS FOR PASSING HEATING CURRENT THROUGH SAID ROD;
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-08-14 | 1971-02-13 | 1971-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-08-14 | 1975-02-13 | 1975-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-08-14 | 1979-02-13 | 1979-08-15 | $7700.00 | Window Closed / Lapsed |