Thin film pressure transducer

Claim 1

IN A THIN FILM PRESSURE TRANSDUCER ASSEMBLY OF THE CAPACITANCE TYPE FOR MEASURING HIGH FREQUENCY PRESSURE FLUCTUATIONS, THE COMBINATION COMPRISING, A RIGID DIELECTRIC BASE, A FIXED PLANAR ELECTRODE HAVING ONE OF ITS SURFACES AFFIXED TO THE TOP SURFACE OF SAID BASE, SAID FIXED ELECTRODE HAVING A GREAT MULTIPLICITY OF ANNULAR CONCENTRIC CAVITIES DEPENDING FROM ITS OPPOSITE SURFACE, SAID CONCENTRIC CAVITIES BEING OF A PREDETERMINED LINE AND SPACE WIDTH IN THE ORDER OF .0005 INCH, A THIN FLEXIBLE DIELECTRIC LAYER HAVING A THICKNESS OF LESS THAN .0005 INCH COVERING SAID FIXED ELECTRODE AND SAID LAYER BEING SECURED ALONG ITS INNER SURFACE MARGINAL EDGE PORTIONS TO THE TOP SURFACE OF SAID RIGID DIELECTRIC BASE TO ENTRAP AIR WITHIN SAID CAVITIES, A VACUUM DEPOSITED THIN FILM HAVING A THICKNESS OF LESS THAN .00015 INCH ALIGNED IN OPPOSED RELATION WITH SAID FIXED ELECTRODE AND SECURED ON THE OUTER SURFACE OF SAID FLEXIBLE DIELECTRIC LAYER, WHEREBY CHANGES IN PRESSURE ON SAID THIN FILM ELECTRODE CAUSE PORTIONS OF THE SAME AND CONTIGUOUS PORTIONS OF SAID FLEXIBLE DIELECTRIC LAYER TO BE MOVED NORMAL TO THE OPENINGS IN SAID CAVITIES TO CHANGE THE CAPACITANCE OF THE TRANSDUCER.