US3314869A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing multilayer microcircuitry including electropolishing to smooth film conductors
Assignee: International Business Machines Corp
•
Filing: 1963-01-21
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Granted: 1967-04-18
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Expires: 1983-01-21
Abstract
No abstract record available.
Inventors
- 👤 William J Dobbin
- 👤 Jr Arthur E Lessor
- 👤 Fred S Maddocks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 05:42
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; C; C23; C23F; C23F1/00; C23F1/02; C23F1/10; C23F1/14; C23F1/16; C23F1/26; H01; H01B; H01B3/00; H01B3/002; H01B3/004; H05K3/02; H05K3/06; H05K3/067; H10; H10N; H10N97/00; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0338; H05K2203/00; H05K2203/03; H05K2203/0346; H05K3/07; H05K3/10; H05K3/108; H05K3/38; H05K3/388; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
17 words
IN THE PRODUCTION OF A DEPOSITED MULTILAYER THIN FILM ASSEMBLY COMPRISING A PAIR OF CONDUCTOR ELEMENTS IN
Claim 2
Dependent Claim
17 words
IN THE PRODUCTION OF A DEPOSITED MULTILAYER THIN FILM ASSEMBLY COMPRISING A PAIR OF CONDUCTOR ELEMENTS IN
Claim 3
Dependent Claim
108 words
IN THE PRODUCTION OF A DEPOSITED MULTILAYER THIN FILM ASSEMBLY COMPRISING A PAIR OF CONDUCTOR ELEMENTS IN DIFFERENT LAYERS OF SAID ASSEMBLY WITH AN INSULATING MATERIAL LAYER IN THE ORDER OF ONE TO TEN MICRONS THICK THEREBETWEEN, THE IMPROVEMENT WHICH COMPRISES ELECTRO-POLISHING THE OUTER FACE SURFACE OF THE FIRST OF SID ELEMENTS TO BE DEPOSITED, BEFORE DEPOSITING SAID INSULATING MATERIAL OVER SAID FACE SURFACE, SAID FIRST ELEMENT BEING GOLD IS IN THE ORDER OF ONE MICRON THICK, AND SAID ELECTRO-POLISHING BEING UNDERTAKEN IN A VISCOUS ELECTROLYTE, UNTILSAID FIRST ELEMENT IS SUBSTANTIALLY SMOOTHED, SAID ELECTROLYTE CONSISTING ESSENTAILLY OF POTASSIUM CYANIDE AND AN EFFECTIVE AMOUNT OF CHEMICALLY INERT THICKENING AGENT.
Claim 4
Dependent Claim
108 words
IN THE PRODUCTION OF A DEPOSITED MULTILAYER THIN FILM ASSEMBLY COMPRISING A PAIR OF CONDUCTOR ELEMENTS IN DIFFERENT LAYERS OF SAID ASSEMBLY WITH AN INSULATING MATERIAL LAYER IN THE ORDER OF ONE TO TEN MICRONS THICK THEREBETWEEN, THE IMPROVEMENT WHICH COMPRISES ELECTRO-POLISHING THE OUTER FACE SURFACE OF THE FIRST OF SID ELEMENTS TO BE DEPOSITED, BEFORE DEPOSITING SAID INSULATING MATERIAL OVER SAID FACE SURFACE, SAID FIRST ELEMENT BEING GOLD IS IN THE ORDER OF ONE MICRON THICK, AND SAID ELECTRO-POLISHING BEING UNDERTAKEN IN A VISCOUS ELECTROLYTE, UNTILSAID FIRST ELEMENT IS SUBSTANTIALLY SMOOTHED, SAID ELECTROLYTE CONSISTING ESSENTAILLY OF POTASSIUM CYANIDE AND AN EFFECTIVE AMOUNT OF CHEMICALLY INERT THICKENING AGENT.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-04-17 | 1970-10-17 | 1971-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-04-17 | 1974-10-17 | 1975-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-04-17 | 1978-10-17 | 1979-04-18 | $7700.00 | Window Closed / Lapsed |