US3303067A
Expired / Lapsed
US
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Method of fabricating thin film transistor devices
Assignee: International Business Machines Corp
•
Filing: 1963-12-26
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Granted: 1967-02-07
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Expires: 1983-12-26
Abstract
No abstract record available.
Inventors
- 👤 Rudolph R Haering
- 👤 Mark G Miksic
- 👤 William B Pennebaker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 04:56
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/674; H10D30/675; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D99/00; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2922; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3428; Y; Y10; Y10S; Y10S148/00; Y10S148/053; Y10S148/064; Y10S148/15; Y10S148/158; Y10S148/169; Y10S252/00; Y10S252/95; Y10S252/951; Y10S438/00; Y10S438/909
Claims Analysis
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References Cited (Backward Citations)
US3162556A
Cited
US2994621A
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US2820841A
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US2921905A
Cited
US3092591A
Cited
US3179541A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-02-06 | 1970-08-08 | 1971-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-02-06 | 1974-08-08 | 1975-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-02-06 | 1978-08-08 | 1979-02-07 | $7700.00 | Window Closed / Lapsed |