US3295492A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Jogging device in apparatus for treating semiconductor wafers in gas
Assignee: Siemens Schuckertwerke AG
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Filing: 1964-05-25
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Granted: 1967-01-03
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Expires: 1984-05-25
Abstract
No abstract record available.
Inventors
- 👤 Schink Norbert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 10:26
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/12; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C30B31/00; C30B31/06; C30B31/10; C30B31/103; C30B31/14; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
95 words
IN AN APPARATUS FOR HEAT TREATING SEMICONDUCTOR WAFERS IN GAS, THE COMBINATION COMPRISING FURNACE MEANS, HOLDER MEANS FOR VERTICALLY SUPPORTING A STACK OF SEMICONDUCTOR WAFERS SUPERIMPOSED ON ONE ANOTHER WITHIN SAID FURNACE MEANS FOR HEAT TREATING THE WAFERS THEREIN, AND OSCILLATING MEANS FOR IMPARTING A SERIES OF SHOCKS TO THE SEMICONDUCTOR WAFERS OF SAID STACK HAVING AT LEAST A COMPONENT IN THE AXIAL DIRECTION THEREOF AS THE WAFERS ARE BEING HEAT TREATED WHEREBY EACH OF SAID HEATED SEMICONDUCTOR WAFERS IS DISPLACED AND AT LEAST PARTLY SPACED TEMPORARILY FROM THE ADJACENT SEMICONDUCTOR WAFER OF THE STACK.
Claim 2
Dependent Claim
95 words
IN AN APPARATUS FOR HEAT TREATING SEMICONDUCTOR WAFERS IN GAS, THE COMBINATION COMPRISING FURNACE MEANS, HOLDER MEANS FOR VERTICALLY SUPPORTING A STACK OF SEMICONDUCTOR WAFERS SUPERIMPOSED ON ONE ANOTHER WITHIN SAID FURNACE MEANS FOR HEAT TREATING THE WAFERS THEREIN, AND OSCILLATING MEANS FOR IMPARTING A SERIES OF SHOCKS TO THE SEMICONDUCTOR WAFERS OF SAID STACK HAVING AT LEAST A COMPONENT IN THE AXIAL DIRECTION THEREOF AS THE WAFERS ARE BEING HEAT TREATED WHEREBY EACH OF SAID HEATED SEMICONDUCTOR WAFERS IS DISPLACED AND AT LEAST PARTLY SPACED TEMPORARILY FROM THE ADJACENT SEMICONDUCTOR WAFER OF THE STACK.
References Cited (Backward Citations)
US1620058A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-01-02 | 1970-07-04 | 1971-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-01-02 | 1974-07-04 | 1975-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-01-02 | 1978-07-04 | 1979-01-03 | $7700.00 | Window Closed / Lapsed |