US3290738A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for producing semiconductor devices
Assignee: Siemens and Halske AG
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Filing: 1964-01-08
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Granted: 1966-12-13
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Expires: 1984-01-08
Abstract
No abstract record available.
Inventors
- 👤 Klima Karl Gerhardt
- 👤 Noss Kornelius
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:38
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/50
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
187 words
IN AN APPARATUS FOR PRODUCING SEMICONDUCTOR DEVICES, AN AIRTIGHT PROCESSING ZONE HAVING AN ALIGNED INLET AND OUTLET, GUIDE MEANS MOUNTED IN SAID PROCESSING ZONE AND DEFINING A PATH THERETHROUGH FOR A COLUMN OF AT LEAST THREE SUPERIMPOSED MOLD MEMBERS OF WHICH AT LEAST ONE MEMBER CONTAINS SEMICONDUCTOR MATERIAL TO BE PROCESSED IN SAID PROCESSING ZONE, AT LEAST THREE SPACED ANNULAR SEALING LIPS OF RESILIENT MATERIAL ALIGNED WITH SAID INLET AND OUTLET RESPECTIVELY, SAID SEALING LIPS BEING AIRTIGHTLY CONNECTED AT THEIR PERIPHERIES SO AS TO DEFINE AN AIRTIGHT PASSAGE COMMUNICATING WITH SAID PROCESSING ZONE, MEANS FOR ALIGNING THE SUPERIMPOSED MOLD MEMBERS WITH SAID ANNULAR SEALING LIPS AND SAID PROCESSING ZONE PATH, AND MEANS FOR SUCCESSIVELY DISPLACING THE MOLD MEMBERS THROUGH SAID ANNULAR SEALING LIPS AND SAID PROCESSING ZONE PATH, THE SPACING BETWEEN SAID SEALING LIPS BEING PREDETERMINED IN RELATION TO THE DIMENSION OF EACH MOLD MEMBER IN THE DIRECTION OF DISPLACEMENT SO THAT AT LEAST ONE OF THE MOLD MEMBERS IS SEALINGLY ENGAGED BY AT LEAST ONE OF SAID ANNULAR SEALING LIPS AT SAID INLET AND OUTLET AS THE MOLD MEMBERS ARE DISPLACED THROUGH SAID ANNULAR SEALING LIPS.
Claim 2
Dependent Claim
187 words
IN AN APPARATUS FOR PRODUCING SEMICONDUCTOR DEVICES, AN AIRTIGHT PROCESSING ZONE HAVING AN ALIGNED INLET AND OUTLET, GUIDE MEANS MOUNTED IN SAID PROCESSING ZONE AND DEFINING A PATH THERETHROUGH FOR A COLUMN OF AT LEAST THREE SUPERIMPOSED MOLD MEMBERS OF WHICH AT LEAST ONE MEMBER CONTAINS SEMICONDUCTOR MATERIAL TO BE PROCESSED IN SAID PROCESSING ZONE, AT LEAST THREE SPACED ANNULAR SEALING LIPS OF RESILIENT MATERIAL ALIGNED WITH SAID INLET AND OUTLET RESPECTIVELY, SAID SEALING LIPS BEING AIRTIGHTLY CONNECTED AT THEIR PERIPHERIES SO AS TO DEFINE AN AIRTIGHT PASSAGE COMMUNICATING WITH SAID PROCESSING ZONE, MEANS FOR ALIGNING THE SUPERIMPOSED MOLD MEMBERS WITH SAID ANNULAR SEALING LIPS AND SAID PROCESSING ZONE PATH, AND MEANS FOR SUCCESSIVELY DISPLACING THE MOLD MEMBERS THROUGH SAID ANNULAR SEALING LIPS AND SAID PROCESSING ZONE PATH, THE SPACING BETWEEN SAID SEALING LIPS BEING PREDETERMINED IN RELATION TO THE DIMENSION OF EACH MOLD MEMBER IN THE DIRECTION OF DISPLACEMENT SO THAT AT LEAST ONE OF THE MOLD MEMBERS IS SEALINGLY ENGAGED BY AT LEAST ONE OF SAID ANNULAR SEALING LIPS AT SAID INLET AND OUTLET AS THE MOLD MEMBERS ARE DISPLACED THROUGH SAID ANNULAR SEALING LIPS.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-12 | 1970-06-13 | 1970-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-12 | 1974-06-13 | 1974-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-12 | 1978-06-13 | 1978-12-13 | $7700.00 | Window Closed / Lapsed |