US3288662A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of etching to dice a semiconductor slice
Assignee: RCA Corp
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Filing: 1963-07-18
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Granted: 1966-11-29
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Expires: 1983-07-18
Abstract
No abstract record available.
Inventors
- 👤 Weisberg Harry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 10:09
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/02; H; H10; H10P; H10P14/00; H10P14/40; H10P14/46; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646; H10P50/69; H10P50/691; H10P50/692; H10P50/693; Y; Y10; Y10S; Y10S148/00; Y10S148/028; Y10S148/051; Y10S148/054
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
123 words
THE METHOD OF DICING A SLICE OF SEMICONDUCTIVE MATERIAL INTO FRUSTUM-SHAPED DICE, COMPRISING THE STEPS OF METALLIZING A PLURALITY OF PAIRED CONCENTRIC AREAS IN REGISTRY ON OPPOSITE MAJOR FACES OF SAID SLICE WITH A FILM OF A METAL SELECTED FROM THE GROUP CONSISTING OF COBALT, NICKEL, RHODIUM, PALLADIUM, IRIDIUM, PLATINUM, COPPER, SILVER AND GOLD, ONE AREA OF EACH SAID PAIR BEING LARGER THAN THE OPPOSITE AREA, COATING SAID METALLIZED AREAS ONLY WITH A METALLIC MATERIAL SELECTED FROM THE GROUP CONSISTING OF LEAD, TIN AND LEAD-TIN ALLOYS, AND IMMERSING SAID SLICE IN AN ETCHANT CAPABLE OF DISSOLVING SAID SEMICONDUCTIVE MATERIAL BUT RELATIVELY INERT WITH RESPECT TO SAID METALLIC MATERIAL TO DISSOVE THE UNCOATED PORTIONS OF SAID SLICE AND PRODUCE A PLURALITY OF FRUSTUM-SHAPED DICE.
Claim 2
Independent Claim
123 words
THE METHOD OF DICING A SLICE OF SEMICONDUCTIVE MATERIAL INTO FRUSTUM-SHAPED DICE, COMPRISING THE STEPS OF METALLIZING A PLURALITY OF PAIRED CONCENTRIC AREAS IN REGISTRY ON OPPOSITE MAJOR FACES OF SAID SLICE WITH A FILM OF A METAL SELECTED FROM THE GROUP CONSISTING OF COBALT, NICKEL, RHODIUM, PALLADIUM, IRIDIUM, PLATINUM, COPPER, SILVER AND GOLD, ONE AREA OF EACH SAID PAIR BEING LARGER THAN THE OPPOSITE AREA, COATING SAID METALLIZED AREAS ONLY WITH A METALLIC MATERIAL SELECTED FROM THE GROUP CONSISTING OF LEAD, TIN AND LEAD-TIN ALLOYS, AND IMMERSING SAID SLICE IN AN ETCHANT CAPABLE OF DISSOLVING SAID SEMICONDUCTIVE MATERIAL BUT RELATIVELY INERT WITH RESPECT TO SAID METALLIC MATERIAL TO DISSOVE THE UNCOATED PORTIONS OF SAID SLICE AND PRODUCE A PLURALITY OF FRUSTUM-SHAPED DICE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-11-28 | 1970-05-30 | 1970-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-11-28 | 1974-05-30 | 1974-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-11-28 | 1978-05-30 | 1978-11-29 | $7700.00 | Window Closed / Lapsed |