Method and apparatus for producing articles having arrays of similar patterns

Claim 1

A METHOD FOR PRODUCING A CIRCUIT ASSEMBLY HAVING A PLURALITY OF CIRCUIT ELEMENTS FORMED THEREIN IN A NUMBER OF DISCRETE LOCATIONS, WITH EACH SAID ELEMENTS COMPRISING A NUMBER OF ACCURATELY REGISTERED MEMBERS COMPRISING THE STEPS OF: PROVIDING AN ARRAY OF INDIVIDUAL LENSES OF THE SAME ORIENTATION AND FOCAL DISTANCE IN A FIRST LOCATION; COATING SAID ASSEMBLY WITH A PHOTOSENSITIVE SUBSTANCE AND POSITIONING SAID ASSEMBLY IN CONTACT WITH SAID ARRAY; PROJECTING A MASTER PATTERN OF A FIRST CIRCUIT MEMBER THROUGH SAID LENS ARRAY FOR AN INTERVAL OF TIME AND FROM A PREDETERMINED LOCATION TO EXPOSE SAID COATING AND TO ESTABLISH A SET OF IMAGES THEREIN LIKE SAID FIRST CIRCUIT MEMBER; DEVELOPING SAID COATING TO ESTABLISH AN APERTURED LAYER ON SAID CIRCUIT ASSEMBLY FOR CONTROLLING A SUBSEQUENT FIRST SEQUENCE OF FABRICATION STEPS; MAINTAINING SAID LENS ARRAY IN SAID FIRST LOCATION; RECOATING SAID ASSEMBLY A SECOND TIME WITH A PHOTOSENSITIVE SUBSTANCE UPON COMPLETION OF SAID FIRST SEQUENCE OF FABRICATION STEPS AND POSITIONING SAID ASSEMBLY ADJACENT SAID ARRAY; PROJECTING A MASTER PATTERN OF A SECOND CIRCUIT MEMBER THROUGH SAID LENS ARRAY FOR AN INTERVAL OF TIME AND FROM SAID PREDETERMINED LOCATION TO EXPOSE SAID SECOND COATING TO ESTABLISH THEREIN A SET OF IMAGES LIKE SAID SECOND CIRCUIT MEMBER; AND DEVELOPING SAID SECOND COATING TO ESTABLISH AN APERTURED LAYER ON SAID CIRCUIT ASSEMBLY FOR CONTROLLING A SUBSEQUENT SECOND SEQUENCE OF FABRICATION STEPS.

Claim 2

A METHOD FOR PRODUCING A CIRCUIT ASSEMBLY HAVING A PLURALITY OF CIRCUIT ELEMENTS FORMED THEREIN IN A NUMBER OF DISCRETE LOCATIONS, WITH EACH SAID ELEMENTS COMPRISING A NUMBER OF ACCURATELY REGISTERED MEMBERS COMPRISING THE STEPS OF: PROVIDING AN ARRAY OF INDIVIDUAL LENSES OF THE SAME ORIENTATION AND FOCAL DISTANCE IN A FIRST LOCATION; COATING SAID ASSEMBLY WITH A PHOTOSENSITIVE SUBSTANCE AND POSITIONING SAID ASSEMBLY IN CONTACT WITH SAID ARRAY; PROJECTING A MASTER PATTERN OF A FIRST CIRCUIT MEMBER THROUGH SAID LENS ARRAY FOR AN INTERVAL OF TIME AND FROM A PREDETERMINED LOCATION TO EXPOSE SAID COATING AND TO ESTABLISH A SET OF IMAGES THEREIN LIKE SAID FIRST CIRCUIT MEMBER; DEVELOPING SAID COATING TO ESTABLISH AN APERTURED LAYER ON SAID CIRCUIT ASSEMBLY FOR CONTROLLING A SUBSEQUENT FIRST SEQUENCE OF FABRICATION STEPS; MAINTAINING SAID LENS ARRAY IN SAID FIRST LOCATION; RECOATING SAID ASSEMBLY A SECOND TIME WITH A PHOTOSENSITIVE SUBSTANCE UPON COMPLETION OF SAID FIRST SEQUENCE OF FABRICATION STEPS AND POSITIONING SAID ASSEMBLY ADJACENT SAID ARRAY; PROJECTING A MASTER PATTERN OF A SECOND CIRCUIT MEMBER THROUGH SAID LENS ARRAY FOR AN INTERVAL OF TIME AND FROM SAID PREDETERMINED LOCATION TO EXPOSE SAID SECOND COATING TO ESTABLISH THEREIN A SET OF IMAGES LIKE SAID SECOND CIRCUIT MEMBER; AND DEVELOPING SAID SECOND COATING TO ESTABLISH AN APERTURED LAYER ON SAID CIRCUIT ASSEMBLY FOR CONTROLLING A SUBSEQUENT SECOND SEQUENCE OF FABRICATION STEPS.