US3286690A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor deposition mask
Assignee: AT&T Inc
•
Filing: 1963-05-09
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Granted: 1966-11-22
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Expires: 1983-05-09
Abstract
No abstract record available.
Inventors
- 👤 Jr John Mcglasson
- 👤 James T Nelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:10
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B23/04; C23; C23C; C23C14/00; C23C14/04; C23C14/042; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
104 words
A MASK FOR CONTROLLING THE DEPOSITION PATTERN OF VAPOR DEPOSITED MATERIAL FROM AN EVAPORATION SOURCE COMPRISING A THIN SLICE OF SEMICONDUCTOR MATERIAL HAVING A COATING OF OXIDE ON AT LEAST ONE FACE THEREOF, SAID COATING HAVING AN APERTURE THEREIN DEFINING THE DEPOSITION PATTERN, SAID SLICE HAVING AN UNDER CUT CLEARANCE PASSAGE THERETHROUGH UNDERLYING SAID APERTURE, ANY PLANE CROSS SECTIONAL AREA OF SAID PASSAGE PARALLEL TO THE PLANE OF SAID ONE FACE BEING GREATER THAN THE ARE OF SAID APERTURE AND NONE OF SAID SLICE LYING WITHIN THE PERIMETER OF SAID APERTURE DEFINED BY LINES PERPENDICULAR TO THE FACE AROUND THE PERIMETER OF SAID APERTURE.
Claim 2
Dependent Claim
104 words
A MASK FOR CONTROLLING THE DEPOSITION PATTERN OF VAPOR DEPOSITED MATERIAL FROM AN EVAPORATION SOURCE COMPRISING A THIN SLICE OF SEMICONDUCTOR MATERIAL HAVING A COATING OF OXIDE ON AT LEAST ONE FACE THEREOF, SAID COATING HAVING AN APERTURE THEREIN DEFINING THE DEPOSITION PATTERN, SAID SLICE HAVING AN UNDER CUT CLEARANCE PASSAGE THERETHROUGH UNDERLYING SAID APERTURE, ANY PLANE CROSS SECTIONAL AREA OF SAID PASSAGE PARALLEL TO THE PLANE OF SAID ONE FACE BEING GREATER THAN THE ARE OF SAID APERTURE AND NONE OF SAID SLICE LYING WITHIN THE PERIMETER OF SAID APERTURE DEFINED BY LINES PERPENDICULAR TO THE FACE AROUND THE PERIMETER OF SAID APERTURE.
References Cited (Backward Citations)
US2899344A
Cited
US3193418A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-11-21 | 1970-05-23 | 1970-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-11-21 | 1974-05-23 | 1974-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-11-21 | 1978-05-23 | 1978-11-22 | $7700.00 | Window Closed / Lapsed |