US3278407A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition of thin film by sputtering
Assignee: International Business Machines Corp
•
Filing: 1963-06-26
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Granted: 1966-10-11
•
Expires: 1983-06-26
Abstract
No abstract record available.
Inventors
- 👤 Campbell Eric Kav
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:35
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
135 words
THE METHOD OF COATING AN ARTICLE BY SPUTTERING, WHEREIN SAID ARTICLE IS ARRANGED WITHIN A CLOSED VESSEL HAVING A CATHODE AN ANODE, COMPRISING THE STEPS OF: IMPOSING WITHIN SAID VESSEL A SUITABLE PRESSURE OF IONIZABLE GAS AND A SUITABLE ANODE-CATHODE VOLTAGE POTENTIAL DIFFERENCE TO THEREBY OBTAIN ABNORMAL GLOW DISCHARGE CONDITIONS THEREIN, SHIELDING THE NONDISCHARGING SURFACES OF SAID CATHODE AT A VOLTAGE POTENTIAL APPROXIMATING THAT OF SAID ANODE AND AT A DISTANCE FROM SAID CATHODE OF LESS THAN THE AXIAL LENGTH OF THE CROOKES DARK SPACE OBTAINING AT THE GIVEN GLOW DISCHARGE CONDITIONS, SAID SHIELDING EXTENDING UP TO APPROXIMATELY 3/8 INCH BEYOND THE DISCHARGE SURFACE OF SAID CATHODE, AND DISPOSING SAID ANODE AT A DISTANCE FROM SAID CATHODE GREATER THAN SAID AXIAL LENGTH OF THE CROOKES DARK SPACE AND IN THE CLOSEST ZONE OF RANDOMIZED ELECTRONDIRECTIONALITY.
Claim 2
Independent Claim
135 words
THE METHOD OF COATING AN ARTICLE BY SPUTTERING, WHEREIN SAID ARTICLE IS ARRANGED WITHIN A CLOSED VESSEL HAVING A CATHODE AN ANODE, COMPRISING THE STEPS OF: IMPOSING WITHIN SAID VESSEL A SUITABLE PRESSURE OF IONIZABLE GAS AND A SUITABLE ANODE-CATHODE VOLTAGE POTENTIAL DIFFERENCE TO THEREBY OBTAIN ABNORMAL GLOW DISCHARGE CONDITIONS THEREIN, SHIELDING THE NONDISCHARGING SURFACES OF SAID CATHODE AT A VOLTAGE POTENTIAL APPROXIMATING THAT OF SAID ANODE AND AT A DISTANCE FROM SAID CATHODE OF LESS THAN THE AXIAL LENGTH OF THE CROOKES DARK SPACE OBTAINING AT THE GIVEN GLOW DISCHARGE CONDITIONS, SAID SHIELDING EXTENDING UP TO APPROXIMATELY 3/8 INCH BEYOND THE DISCHARGE SURFACE OF SAID CATHODE, AND DISPOSING SAID ANODE AT A DISTANCE FROM SAID CATHODE GREATER THAN SAID AXIAL LENGTH OF THE CROOKES DARK SPACE AND IN THE CLOSEST ZONE OF RANDOMIZED ELECTRONDIRECTIONALITY.
References Cited (Backward Citations)
US2219611A
Cited
US2305758A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-10-10 | 1970-04-11 | 1970-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-10-10 | 1974-04-11 | 1974-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-10-10 | 1978-04-11 | 1978-10-11 | $7700.00 | Window Closed / Lapsed |