US3263648A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coating apparatus employing rotating and reciprocating filament
Assignee: International Business Machines Corp
•
Filing: 1962-12-05
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Granted: 1966-08-02
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Expires: 1982-12-05
Abstract
No abstract record available.
Inventors
- 👤 Richard M Chapman
- 👤 John N Ramsey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:43
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/26
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
112 words
AN APPARATUS FOR EVAPORATING A FILM ON A SUBSTRATE IN A VACUUM ATMOSPHERE COMPRISING: A FILAMENTARY SOURCE OF VAPORIZABLE MATERIAL WHICH MAY HAVE NONCYLINDRICAL SYMMETRY BECAUSE OF SURFACE IMPERFECTIONS OR DEPARTURES FROM A CIRCULAR CROSS SECTION, SPACED FROM SAID SUBSTRATE, SAID SOURCE HAVING AN AXIS WHICH IS SUBSTANTIALLY PARALLEL TO THE LENGTH OF SAID SUBSTRATE; AND MEANS FOR PROVIDING RELATIVE ROTATION BETWEEN SAID SUBSTRATE AND SAID SOURCE ABOUT THE AXIS OF THE LATTER WHILE SIMULTANEOUSLY PROVIDING A PREDETERMINED NONUNIFORM RECIPROCATING RELATIVE MOTION BETWEEN SAID SUBSTRATE AND SAID SOURCE ALONG SAID AXIS, THEREBY PRODUCING ON SAID SUBSTRATE DURING THE EVAPORATION OF SAID MATERIAL FROM SAID SOURCE, A FILM HAVING A DESIRED THICKNESS CHARACTERISTIC.
Claim 2
Independent Claim
112 words
AN APPARATUS FOR EVAPORATING A FILM ON A SUBSTRATE IN A VACUUM ATMOSPHERE COMPRISING: A FILAMENTARY SOURCE OF VAPORIZABLE MATERIAL WHICH MAY HAVE NONCYLINDRICAL SYMMETRY BECAUSE OF SURFACE IMPERFECTIONS OR DEPARTURES FROM A CIRCULAR CROSS SECTION, SPACED FROM SAID SUBSTRATE, SAID SOURCE HAVING AN AXIS WHICH IS SUBSTANTIALLY PARALLEL TO THE LENGTH OF SAID SUBSTRATE; AND MEANS FOR PROVIDING RELATIVE ROTATION BETWEEN SAID SUBSTRATE AND SAID SOURCE ABOUT THE AXIS OF THE LATTER WHILE SIMULTANEOUSLY PROVIDING A PREDETERMINED NONUNIFORM RECIPROCATING RELATIVE MOTION BETWEEN SAID SUBSTRATE AND SAID SOURCE ALONG SAID AXIS, THEREBY PRODUCING ON SAID SUBSTRATE DURING THE EVAPORATION OF SAID MATERIAL FROM SAID SOURCE, A FILM HAVING A DESIRED THICKNESS CHARACTERISTIC.
References Cited (Backward Citations)
US2373823A
Cited
US2847325A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-08-01 | 1970-01-31 | 1970-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-08-01 | 1974-01-31 | 1974-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-08-01 | 1978-01-31 | 1978-08-02 | $7700.00 | Window Closed / Lapsed |